Automation Solutions for Manufacturing

Brooks provides automation solutions that address critical manufacturing challenges across semiconductor, life sciences, and advanced industrial environments. Drawing on deep engineering expertise and application knowledge, Brooks delivers an automated advantage where yield, contamination control, precision handling, and operational stability matter most. 

Rather than approaching these challenges in isolation, Brooks organizes its solutions around the high-value problems customers need to solve, enabling reliable performance across complex production environments. 

 

Proven Capabilities for Critical Manufacturing Challenges 

Brooks delivers proven capabilities that solve the complex automation challenges found in advanced manufacturing environments.
These solutions combine precision engineering, application knowledge, and global support to deliver
reliable performance where production outcomes matter most.
 

 

Vacuum Automation

Clean, precise, and reliable substrate transport within highly controlled vacuum manufacturing environments.

SOLUTIONS:

  • MagnaTran® LEAP™ vacuum robots
  • Marathon® vacuum system platforms
  • Marathon® LEAP™ AX front-end EFEM platforms

Advanced Packaging

Automation designed to reliably manage complex substrates and evolving semiconductor packaging processes with precision.

SOLUTIONS:

  • Marathon® LEAP™ AX EFEM platforms
  • Marathon® LEAP™ SX sorter platforms
  • Vision Mapping & Dynamic Pick

Contamination Control

Technologies that measure, analyze, clean, and protect critical carriers to maintain yield and continuous uptime.

SOLUTIONS:

  • PuroMaxx® FOUP cleaning & inspection
  • PuroMetricTM Carrier inspection FOUP FOSB Metrology
  • PuroSenseTM FOUP Cleaner 
  • PuroViewTM FOUP AMC Metrology software
  • PuroVisionTM EIP Inspection system

Reticle Management & Lithography

Automation solutions that transport and protect highly valuable reticles.

SOLUTIONS:

  • GuardianPro® reticle storage and EUV pod stocker platforms
  • PuroMaxx® reticle changers and EUV pod cleaning systems

Interface Automation

Integrated factory-level automation that lowers cost of ownership by reducing operational risk and supporting long-term manufacturing performance.

SOLUTIONS:

  • AutoID RFID-based asset tracking
  • Vision LEAP™ / SMIF VersaPort® load ports
  • Marathon® Sorter workflow coordination

Laboratory Automation

Automation solutions that optimize laboratory workflows, sample handling, and analytical processes.

Learn more about all our Laboratory Automation Solutions

SOLUTIONS:

Industrial Automation

Solutions engineered for precise, safe, and reliable automation in advanced manufacturing environments.

Learn more about our Industrial Automation Solutions

SOLUTIONS:

A person in cleanroom attire operates machinery inside a laboratory or manufacturing facility, surrounded by technical equipment and workstations.

Service

Global service solutions that maximize uptime, extend equipment life, and support long-term performance across semiconductor manufacturing operations.

Service

Start with the Problem
That Matters Most

Work with teams who understand the realities of advanced manufacturing and focus on solving problems that affect performance, reliability, and scale.

Contact Brooks