Semiconductor Automation

Your Trusted Service Partner
Brooks offers a broad portfolio of wafer handling robotics and integrated systems that serve as critical components of complex production tools running in the world’s most advanced wafer fabs. Our vacuum and atmospheric robots and tool automation systems provide clean, precise handling of wafers for exceptional production performance, reliability, and value. Our factory automation solutions include ultra-clean wafer sorters and load ports, as well as RFID tracking technologies to validate material at each process and metrology step.   

Brooks provides industry-leading semiconductor automation products designed to improve manufacturing performance and productivity for both atmospheric and vacuum-based tools.

Our semiconductor automation products include some of the most trusted and widely used brands in the business: MagnaTran® LEAP vacuum robots leverage 20+ years of proven arm technology and direct drive innovations; next-generation Marathon® LEAP AX single-wafer transport systems deliver high throughput to maximize productivity; Marathon Express® vacuum transport system provides superior performance for 100mm to 200mm wafer applications; intelligent Vision LEAP load ports offer high configurability, cleanliness, and reliability for advanced technology nodes.

Brooks is a leading automation provider and partner to the global semiconductor manufacturing industry.