Wafer Carriers | Solutions | Brooks - Brooks Automation

Wafer Carriers

6" Wafer Carrier

A state-of-the-art 6”/150mm wafer carrier includes 25 slo

The 6" wafer carrier is one of the most advanced antistatic materials used and meets and exceeds semi specs

Key Features:

  • Most advanced antistatic materials used
  • Nonporous surfaces
  • Fire retardant UL94 V0
  • Process compatible heat resistance
  • Meets and exceeds semi specs
  • Hydrolytic and chemical resistance

8" Wafer Carrier

A state-of-the-art 8”/200mm wafer carrier includes 25 slots.

The 8" wafer carrier can be equipped with customer-specific identification devices, is antistatic, and features the highest precision and durability.

Key Features:

  • Slot 1-25
  • Can be equipped with customer-specific identification devices, e.g. RFID.
  • Highest precision and durability
  • Customization possible
  • Process compatible heat resistance
  • Antistatic