PuroMaxx Contamination Control Solutions | Solutions | Brooks - Brooks Automation

PuroMaxx Contamination Control Solutions

Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes. 

Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers.

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