GuardianPro-X Reticle Stocker and Pod Buffer
The GuardianPro-X™ family is an innovative combination of reticle stocker and carrier buffer for managing the reticles throughout the fab. This fully automated reticle management system stores up to 2496 reticles and 68 pods on the smallest footprint.
The reticles are safely stored in patented Tec-Cell® modules, providing a purged ISO Class 1 micro-environment.
The system can be configured to accommodate common RSP150 and MRSP150 reticle carriers. Optional OHT load ports enable the system to be integrated with fully automated litho bays
This fully automated reticle management system combines a reticle stocker and a pod stocker for up to 2496 reticles and 68 pods on the smallest footprint.
- Improved access times due to fast access buffer
- Simultaneous access by operators and AMHS with independent manual and OHT load-ports
- Automated reticle management and traceability
- Increased scanner/litho cell uptime
- Reduced reticle rework costs
- Reticle protection from chemical contamination, haze, and crystal growth
- Increased number of exposures for an extended reticle lifetime
- Highest storage density
- Fully automated reticle handling
- Reliable, safe handling for reduced reticle and pellicle damage
- Low cost of ownership (COO)
- Low purge gas consumption