GuardianPro-S | Solutions | Brooks - Brooks Automation

GuardianPro-S

GuardianPro-S Bare Reticle Stocker Family

The GuardianPro-S family provides a fully automated reticle management system with a stocker capacity of up to 2900 reticles on a minimal footprint. The reticles are safely stored in Tec-Cell® modules, ensuring an ISO class 1 microenvironment with xCDA purge.

The GuardianPro-S family supports a variety of different reticle cassettes including SMIF multi-pods (MRSP), SMIF mono-pods (RSP) as well as Nikon and Canon reticle cassette.

The GuardianPro-S family provides a fully automated reticle management system with a stocker capacity of up to 2900 reticles on a minimal footprint.

Key Benefits:

  • Automated reticle management and traceability
  • Increased scanner/litho cell uptime
  • Reduced reticle rework costs
  • Reticle protection from chemical contamination, haze, and crystal growth
  • Increased number of exposures result in an extended reticle lifetime
  • Fully automated reticle handling
  • Reliable, safe handling for reduced reticle and pellicle damage
  • Low cost of ownership (COO)
  • Low purge gas consumption 
  • Highest storage density available in the market

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