The GuardianPro-C | Solutions | Brooks - Brooks Automation

GuardianPro-C

GuardianPro-C Reticle Storage and Inspection System

The GuardianPro-C is a fully automated, highly flexible standalone storage and inspection system for 6" reticles based on a modular, cartesian platform. The flexibility offered in size, features, and functionality makes it ideal for a variety of applications in new or existing production facilities. The GuardianPro-C system supports reticle storage, retrieval, and transfer between a variety of reticle carrier types as well as inspection capabilities. The GuardianPro-C optimizes reticle logistics and scanner/stepper utilization and reduces manual reticle handling.

The flexible GuardianPro-C system can support industry-standard cassette and pod types, such as shipping boxes, Canon, Nikon, and RSP/MSRP.

The flexibility offered in size, features, and functionality makes the GuardianPro-C ideal for a variety of applications in new or existing production facilities.

Key Benefits:

  • Increased scanner/litho cell uptime
  • Reduced scanner idle time; defined reticle arrives safe, on time, correctly oriented, and clean with controlled quality
  • Reduced reticle rework costs
  • Reticle protection from chemical contamination, haze, and crystal growth
  • Extended reticle lifetime results in an increased number of exposures
  • Increased number of possible exposures results in a high wafer in process (WIP) cycle time
  • Quality control, certifiable solution
  • Fully automated reticle handling defined inspection procedures
  • Reliable, safe handling for prevention of reticle and pellicle damage as well as human mistakes
  • Low cost of ownership (COO)
  • Low purge gas consumption 
  • Versatility in size and options

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