GuardianPro-1990 Pod Stockers | Solutions | Brooks - Brooks Automation

GuardianPro-1990 Pod Stockers

The Brooks GuardianPro 1900 Pod stocker provides fully automated pod handling with an integrated continuous purge system for each individual pod.

Key Features:

  • Fully automated RSP150 handling
  • Class 1 mini-environment/ESD/AMC
  • N2/xCDA purge for each pod
  • Purge flow verification
  • Manual back up possible
  • OHT interface

GuardianPro 1900 Fully-Automatic EUV Pod Stocker

The Brooks GuardianPro 1900 EUV pod stocker provides a fully automated EUV pod handling and a continuous purge system for each individual pod.

The Brooks GuardianPro 1900 Pod stocker provides fully automated pod handling with an integrated continuous purge system for each individual pod.

Key Features:

  • Fully automated EUV pod handling
  • ISO Class 2 mini-environment
  • ESD and AMC controlled environment
  • N2/xCDA purge for each pod
  • Purge flow verification
  • High vacuum decontamination chambers for AMC compound removal
  • In-situ measurement capability
  • Manual back up possible
  • OHT interface

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