Brooks is a global leader in the production of vacuum handling robots and modules for semiconductor wafer processing, flat panel display manufacturing, and other complex manufacturing environments. We earned our technology and market leadership position by amassing unparalleled intellectual property that differentiates our best-in class products and provides significant throughput, reliability, and serviceability advantages. The Brooks field-proven wafer transport robots and modules deliver high performance and low total cost of ownership to create manufacturing efficiency, accelerate innovation, and drive profits for today’s manufacturers.

The Brooks InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm SEMI-standard and Jeida-standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square. To maximize the use of transport chamber facets for process modules, the InLigner mounts between the load lock and the transport chamber and allows access to the wafers in the lock.

The field-proven InLigner delivers high-precision performance and optimal flexibility.

Key Features

  • Coordinates directly with the MagnaTran 7 robot to provide orientation and centering within the vacuum envelope
  • Mounts in line with load lock to maximize facet availability for process modules
  • Offers capability for transparent and/or square substrates
  • Supports CE/S2 compliance