M450 450mm FOUP/MAC Cleaner

The M450 fully-automatic 450mm  FOUP/MAC cleaner combines best particle and AMC cleaning performance and provides humidity control.

Key Features

  • High pressure DI-water spraying
  • Lid and shell cleaning separated
  • Lid dry clean function
  • Vacuum decontamination for AMC compound removal
  • FOUP inspection station
  • IR drying technology
  • N2/XCDA purge for load port
  • OHT interface
  • Class 1 mini-environment
  • SEMI standard compliant SECS/GEM interface