The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.
Key Features
- Reticle/Wafer carrier - cleaning system
- Highest product flexibility
- Excellent IR drying system
- High throughput
- Superior wash & rinse
- Lowest CoO
