M1000 EUV Pod Cleaner

The M1000 fully-automatic EUV pod cleaner provides maximum performance by individual cleaning of each EUV or RSP200 part.

Key Features

  • High pressure DI-water spraying
  • Lid and shell cleaning separated
  • Vacuum decontamination for AMC compound removal  
  • IR drying technology
  • N2/XCDA purge for load port
  • OHT interface
  • Class 1 mini-environment
  • SEMI standard compliant SECS/GEM interface