The RX family is an innovative combination of reticle stocker and carrier buffer for manageing the reticles throughout the fab.
The RX is a fully automated reticle management system that combines a reticle and carrier sort and storagesystem for up to
2880 reticles on the smallest footprint.
The reticles are safely stored in patented Tec-Cell® modules, providing an ISO Class 1 micro-environment that can be
optionally purged with N2 or xCDA.
The system can be configured to accommodate common RSP150 and MRSP150 reticle carriers. The field upgradeable OHT load-ports
enable the system to be integrated in fully automated litho bays
Data Sheet
Key Features
- Reduction of haze and crystal growth with the patent pending Tec-Cell® storage technology
- Fastest access time to every single reticle with carrier buffering technology
- Fault free reticle-selection on every retrieval with the intelligent barcode reader system
- Simultaneous access by operators and AMHS with independent manual and OHT load-ports
- Highest reliability based on field proven technology
- Highest storage density available in the market
