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Semiconductor Automation

Products & Solutions
  • Semiconductor Automation
    • Wafer Handling Robotics
    • Wafer Handling Systems
    • Semiconductor Contamination Control
    • Factory Automation Solutions
      • Spartan Sorters
      • Load Ports
      • Reticle Handling
        • M2 Reticle Changers
        • Narrow Reticle Indexer
        • Smart Tag 8200 and 8400 Family
      • SMIF Solutions
    • Asset Tracking & RFID

Reticle Handling

M2 Reticle Changers
M2 Reticle Changers
Narrow Reticle Indexer
Narrow Reticle Indexer
Smart Tag 8200 8400 Family Asset Tracking RFID
Smart Tag 8200 8400 Family
Asset Tracking RFID
 
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  • Products & Solutions
    • Semiconductor Automation
      Featured Product
      Spartan 300 Sorter 4 I/O
      Spartan™ 300mm 4 I/O Sorter
       
        • Wafer Handling Robotics
           
          • Atmospheric Robots
             
            • Reliance ATR Robot
              Reliance ATR Atmospheric Robot
              Reliance ATR Robot
              The Reliance ATR family of robots provide the proven performance, reliability, and ultra-cleanliness and utilizes direct drive technology and DSP-based control electronics.
            • Razor™ Atmospheric Transfer Robot & Modules
              Razor Robot FOUP
              Razor™ Atmospheric Transfer Robot & Modules
              Razor robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations. The Brooks kinematic mounting system, patented motion control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime.
            • Razor™ Aligner
              Atmospheric Razor Aligner
              Razor Aligner
              High-performance atmospheric Razor Aligner provides ultra-precise wafer positioning of 200mm, 300mm, or 450mm wafers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time.
          • Vacuum Robots
             
            • MagnaTran® 7 BiSymmetrik™
              MagnaTran 7 BiSymmetrik Robot
              MagnaTran® 7 BiSymmetrik™
              The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million.
            • MagnaTran® 7 Frogleg™
              MagnaTran 7 Frogleg Robot
              MagnaTran® 7 Frogleg™
              The MagnaTran® 7 Frogleg™ (MAG 7 F) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
            • MagnaTran® 7 Leapfrog®
              MagnaTran 7 Leapfrog Robot
              MagnaTran® 7 Leapfrog®
              The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications.
            • MagnaTran® 7 SCARA
              MagnaTran 7 SCARA Robot
              MagnaTran® 7 SCARA
              The MagnaTran® 7 SCARA (MAG 7) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
            • MagnaTran® 8 QuadraFly
              MagnaTran 8 QuadraFly Robot
              MagnaTran® 8 QuadraFly
              The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter.
            • MagnaTran® 8 Radius™
              MagnaTran 8 Radius Robot
              MagnaTran® 8 Radius™
              The dual arm MagnaTran® 8 Radius™ robot extends the benefits of MagnaTran field-proven direct drive technology to a tri-axial drive. In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter.
          • Components
             
            • InLigner™
              Inligner
              InLigner
              The InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm SEMI-standard and Jeida-standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square.
            • Fusion™ Controls
              Fusion Control
              Fusion Controls
              The industry’s most flexible and complete automation control solution. Fusion Controls deliver maximum performance and uptime. They are fully customizable and remarkably easy to use, while accelerating time to market and tool profitability.
        • Wafer Handling Systems
           
          • Vacuum Systems
             
            • VCE Load Locks
              VCE
              Vacuum Cassette Elevator (VCE) Load Locks
              Available in four styles to suit your wafer fabrication environment, the VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing to enable safe, clean AGV, RGV, or human operator transfer of up to 200mm SEMI standard wafer cassettes.
            • Marathon™ 2 Transport System
              Marathon 2
              Marathon 2 Transport System
              Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements.
            • Marathon™ Express
              Marathon Express
              Marathon Express Vacuum Transport System
              The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications.
          • Atmospheric Systems
             
            • Jet™ Atmospheric Transport System
              Jet 2
              Jet Atmospheric Transport System
              Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.
        • RFID & IR Asset Tracking
        • Factory Automation Solutions
           
          • Spartan Sorters
            Spartan 300mm Sorter 4 I/O
            Spartan Sorters
            This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
          • Load Ports
             
            • IsoPort™ 300 Load Port
              IsoPort
              IsoPort 300 Load Port
              Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to 300mm wafers.
            • Vision™ 300 Load Port
              Vision Loadport with FOUP
              Vision 300 Load Port
              The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration.
            • Certon™ 450 Load Port
              Certon 450mm Load Port
              Certon™ 450 Load Port
              The Certon™ 450mm Load Port is compliant to 450mm FOUP, FOSB, and MAC (Multi Application Carrier) standards.
          • Reticle Handling
             
            • M2 Reticle Changers
              M2 Reticle Changers
              M2 Reticle Changers
              The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
            • Narrow Reticle Indexer
              Narrow Reticle Indexer
              Narrow Reticle Indexer
              Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
          • SMIF Solutions
             
            • SMIF Load Port Transfer (LPT)
              SMIF Loadport Transfer
              SMIF Load Port Transfer (LPT)
              Ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools.
            • SMIF-INX Indexers
              SMIF INX Indexers
              SMIF-INX Indexers
              Designed to supply wafer indexing for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafer handlers.
            • VersaPort™ 2200 Load Port
              VersaPort 2200 SMIF Load Port
              VersaPort 2200 Load Port
              The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.

    • Semiconductor Contamination Control
      Featured Product
      M800
      M800 Fully-Automatic300mm FOUP Cleaner
       
        • Cleaning Equipment
          • FOUP/Pod Cleaners
             
            • M800 300mm FOUP Cleaner
              M800
              M800 300mm FOUP Cleaner
              The M800 fully-automatic 300mm FOUP cleaner combines best particle and AMC cleaning performance and provides humidity control at the highest throughput.
            • M330 Fully-Automatic FOUP Cleaner
              M330 FOUP Cleaner
              M330 FOUP Fully-Automatic Cleaner
              The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and cost-efficiency.
            • M600 Automatic Pod Cleaner
              M600
              M600 Automatic Pod Cleaner
              The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.
            • M300 Semi-Automatic FOUP/Pod Cleaner
              M300
              M300 Semi-Automatic FOUP/Pod Cleaner
              The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.
          • EUV Pod Cleaner
             
            • M1000 EUV Pod Cleaner
              M1000
              EUV Pod Cleaner
              The M1000 fully-automatic EUV pod cleaner provides maximum performance by individual cleaning of each EUV or RSP200 part.
        • Clean Storage
          • Reticle Stockers
            • M1500 Semi-Automatic
              M1500
              M1500 Semi-Automatic Reticle Box Stocker
              The Brooks semi-automatic M1500 reticle box stocker stores up to 1,500 reticles in its cases. The reticle box ID is identified and the data file is logged in the database.
            • M1900 Reticle Stockers
              M1900 Fully Automatic
              M1900 Reticle Stockers
              Four variations of M1900 Reticle Stockers: Fully-Automatic Semi-Bare, Fully-Automatic RSP150, Fully-Automatic EUV POD Stocker, Semi-Automatic.
          • Reticle Storage
            Reticle Storage
            • RPS-C Automated Storage and Management System for SMIF Pods
              RPS-C Automated storage and management system for SMIF pods
              RPS-C Automated Storage and Management System for SMIF Pods
              The RPS-C is a fully automated standalone storage and inventory management system for reticle SMIF pods (RSP) with optional xCDA or N2 purge.
            • RS Bare Reticle Stocker Family
              RS Scalable high density bare reticle stocker family
              RS Bare Reticle Stocker Family
              The RS family provides a fully automated reticle management system that combines a sorter with a stocker capacity up to 2900 reticles.
            • RS-C Reticle Storage and Inspection System
              RS-C Flexible and scalable reticle storage and inspection system
              RS-C Reticle Storage and Inspection System
              The RS-C is a fully automated, highly flexible standalone storage and inspection system for 6".
            • RX Reticle Stocker and Carrier Buffer
              RX The innovative combination of reticle stocker and carrier buffer
              RX Reticle Stocker and Carrier Buffer
              The RX family is an innovative combination of reticle stocker and carrier buffer for managing the reticles throughout the fab.
            • RXi Reticle Inspection, Sorting and Storage Platform
              RXi Reticle inspection, sorting and storage platform
              RXi Reticle Inspection, Sorting and Storage Platform
              The RXi is a fully automated standalone inspection system for 6”.
        •  
          • Wafer Carriers & Boxes
            • Reticle Boxes
              Mega Optical Case
              Reticle Boxes
              • Mega Optical Case
              • A Rapid
              • B Ultra
              • C Swift
              • D Twin
              • Customized
            • Wafer Carriers
              Wafer Carrier 8"
              Wafer Carriers
              • 6" Wafer Carrier
              • 8" Wafer Carrier
            • Wafer Transport Boxes
              Wafer Carrier Transport Box
              Wafer Transport Boxes
              • 200mm Wafer Transport Box
              • 200mm Single Wafer Transport Box
          • Reticle Handling
             
            • M2 Reticle Changers
              M2 Reticl Changers
              M2 Reticle Changers
              The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
            • Narrow Reticle Indexer
              Narrow Reticle Indexer
              Narrow Reticle Indexer
              Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.

    • Life Sciences

    • Cryogenics
      Featured Product
      On-Board IS Cryopump
      On-Board® IS Cryopumps
       
        • Brooks CTI-Cryogenics
           
          • Cryopumps & Compressors
             
            • On-Board® IS Cryopump Systems
              On-Board IS 320 Cryopump
              On-Board® IS Cryopump Systems
              Intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.
            • On-Board® Cryopumps
              On-Board IS Cryopump
              On-Board® Cryopumps
              On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
            • Cryo-Torr® Cryopumps
              CryoTorr 8 Cryopump
              Cryo-Torr® Cryopumps
              Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. For added flexibility, you can add your own customized controls and supporting peripherals to meet your specific application needs.
            • On-Board® Waterpumps
              On-Board Waterpumps
              On-Board® Waterpumps
              On-Board Waterpumps are high-performance vacuum pumps that increase water vapor pumping speeds to substantially improve system throughput and provide better process results.
            • Compressors
              Cryo Compressor
              Compressors
              Brooks CTI-Cryogenics offers a choice of compressors designed to provide optimum performance with On-Board Cryopumps, Cryo-Torr Cryopumps and/or On-Board Waterpumps. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications for all Brooks vacuum pumps.
        • Brooks Polycold
           
          • Cryochillers & Cryocoolers
             
            • P-102 Cryochiller
              P-102 Cryochiller
              P-102 Cryochiller
              Provides a compact, easy-to-use alternative to liquid nitrogen in small vacuum systems. These cryogenerators effectively eliminate the cost, inconvenience, and hazards associated with using liquid nitrogen — while delivering comparable performance.
            • PCC Compact Coolers
              Polycold PCC Component Cooler
              PCC Compact Coolers
              The PCC Compact Cooler is a compact, high-performance cooling system that brings new levels of efficiency and reliability to demanding applications such as high-resolution digital imaging, analytical chemistry, life sciences, materials analysis, semiconductor inspection, scientific research and water vapor cryotrapping.
            • PGC Gas Chillers
              PGC Polycold
              PGC Gas Chillers
              PGC Gas Chillers cool compressed dry gases, such as nitrogen, argon or air, from ambient to cryogenic temperature without pre-cooling. PGC Gas Chillers are closed-loop refrigeration systems that cool a non-recirculating gas stream using a refrigerant to gas tube-in-tube heat exchanger.
            • MaxCool Cryochillers
              XC Cryochiller
              MaxCool Cryochillers
              Polycold MaxCool Cryochillers are closed loop cryogenic refrigeration systems that provide up to 2,500 watts or 4,000 watts of cooling, respectively. These cryochillers can be used to capture water vapor and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. MaxCool cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing.
            • PFC Water Vapor Cryochiller
              PFC Polycold
              PFC Water Vapor Cryochiller
              The Brooks Polycold® PFC Water Vapor Cryochiller effectively captures water vapor, which typically comprises 65% to 95% of the gas load in high vacuum systems. It pumps vapor within minutes of “start,” defrosts in less than four minutes, and lowers water vapor partial pressure during processing for higher quality, better adhesion, and more reproducible deposition.
            • Cryodyne Refrigerators
              Cryodyne Refrigerator
              Cryodyne Refrigerators
              Cryodyne Refrigeration Systems are a family of two-stage, closed-cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle. They offer usable heat lift from <10K to >80K, making them highly suitable for a variety of commercial and research applications.
            • Refrigerant Replacement Charges
              Refrigerant Replacement Charges
              Lookup the refrigerant replacement charge part number for your model number to place an order.
        •  
           

    • Documentation

  • Applications By Industry
    • Semiconductor Tool Automation
        • Display Manufacturing
           
        • LED
           
        • Wafer Level Packaging
           
        • RFID & IR Asset Tracking
           

    • General Vacuum & Cryogenics
        • Technical Library
           
          Brooks Cryogenics technical document library of application notes, technical papers and publications.

    • Life Sciences

  • Services
    • Semiconductor
        • Contact Customer Care
          Customer Care Phone Numbers & Hours
        • Equipment Refurbishment
           
          • Robots
          • Cryopumps & Compressors
          • Cryochillers & CryoTiger
          • Valves, Controllers & Modules
        • Certified Used Equipment
          Certified Used Equipment
          Certified Used Automation and Vacuum Products
        • Repairs & Exchanges
          • Cryopump Repair
             
            • Cryo-Torr® Cryopumps
              CryoTorr 8 Cryopump
              Cryo-Torr® Cryopumps
              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • On-Board® Cryopumps
              On-Board IS Cryopump
              On-Board® Cryopumps
              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • On-Board® IS Cryopumps
              On-Board IS 320 Cryopump
              On-Board® IS Cryopumps
              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • Compressors
              Cryo Compressor
              Compressors
              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
          • Atmospheric Robots
             
            • AcuLigner
              Aculigner Robot
              AcuLigner
              The AcuLigner™ atmospheric robot is an integral part of the Brooks Automation high performance atmospheric wafer handling solutions. Utilizing direct drive technology and on-board controls, these systems play a key role in your performance and productivity. Extensive downtime due to repair is not an option. That’s why Brooks has created a Fixed Price Repair program to support the AcuLigner product.
            • AcuTran AquaTran
              AquaTran Robot Repair
              AcuTran AquaTran
              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the AcuTran/AquaTran 7 family of robots.
            • MultiTran 5 VacuTran 5
              MultiTran VacuTran Robot Repair
              MultiTran 5 / VacuTran 5
              The MTR 5 M model MultiTran® 5 robot with the Brooks patented BiSymmetrik™ arm and dual SEMI/MESC compatible end effectors is a vacuum wafer handling robot which enables high throughput handling in isolated cluster tools.

              The VTR 5 M model VacuTran™ 5 robot is a high reliability wafer-handling robot with a SEMI/MESC compatible arm and end effectors. The VTR 5 M is a top mounting robot with a single arm configuration for application in large transport chamber modules such as those in cluster tools.
            • Razor
              Razor Atmospheric Robot
              Reliance ATR 8
              Razor’s modular design allows customers to customize their field-replaceable unit (FRU) package to align with their mean-time-to-repair (MTTR) strategy and keep unscheduled downtime to a minimum. Brooks offers a Fixed Price Repair program to support the Razor robot.
            • Reliance ATR 8
              Reliance Robot Repair
              Reliance ATR 8
              With the Reliance ATR, lengthy repair cycle times can lead to increased costs and unscheduled downtime. For this reason Brooks has developed a Fixed Price Repair program to support the Reliance ATR.
          • Equipe / PRI Robots
             
            • AxM 100/200/400
              Equipe PRI AxM Robot
              AxM 100/200/400
              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
            • DBM 2400/2700
              Equip PRI DBM Robot Repair
              DBM 2400/2700
              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
            • PRE-200™ PreAligner
              Equipe PRI PreAligner
              PRE-200™ PreAligner
              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
          • Vacuum Robots
             
            • MagnaTran 7
              MagnaTran 7 Vacuum Robot
              MagnaTran 7
              The MagnaTran® 7 (MAG 7) robot is the most advanced and reliable robot for operation in vacuum and isolation environments such as cluster tools. Reliability is proven at > 11.5 MCBF. With the MagnaTran 7 lengthy repair cycle times can lead to increased costs and unscheduled downtime. This is why Brooks created a Fixed Price Repair program to support the MagnaTran 7 robot.
            • MagnaTran 8
              MagnaTran 8 Robot Repair
              MagnaTran 8
              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the MagnaTran 8 family of vacuum robots.
            • VAC 407
              VAC 407 Robot
              VAC 407
              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the VAC-407 vacuum robot.
          • Robot Controllers
            Robot Controllers
            Robot Controllers
            Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the robot controllers, to work with the AXM, DBM, AquaTran™/AcuTran® and Reliance™ ATR™ robot families.
        •  
        • Other Repairs & Exchanges

          Fixed Price Repair program for atmospheric and vacuum robots, vacuum gauges, controllers, monitors and cryopumps.

          • Copper Segregation
            Prevent the contamination of non-copper processes and the equipment used in those processes.
          • Global Repair Locations
            Repair locations in the United States, Europe and Asia.
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          • Onsite Support
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        • Upgrade Services
           
          • CTI-Cryogenics
             
            • Cryo Implanters Upgrades
            • Cryo PVD Upgrades
        • Spare Parts

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            • Refrigerant Replacement Charges

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    • About Brooks
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
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