The Certon™ 450mm Load Port is compliant to 450mm FOUP, FOSB, and MAC (Multi Application Carrier) standards. Unique features include a patent-pending port door engaging mechanisms with synchronized and concurrent closing of Pod Door and capable of 390N of evenly distributed force.
The patented Tilt and Go feature enables installation and removal by a single person and is easily handled due to evenly distributed mass. The 450 Load Port weighs a mere 80kg – half of competing loadports.
Implementation of standard features
- Wafer mapping, including 300mm wafers in a 450mm carrier insert
- Protrusion sensing
- Carrier presence sensing
- Software configurable indicator lights
- Communications – HSMS, SECS, ASCII over RS232, ASCII over Ethernet
Ease of use
- Integrated RFID
- Browser configurable
- Protocol converters to emulate previous and competing loadports
Low Cost of Ownership
- No internal alignment means fast set up times
- No scheduled maintenance
Best in class ergonomics
- “Tilt and Go” for single person servicing
- Patent-pending horizontal door closing mechanism
- To obtain more information on this product contact your regional sales office.