MKS Instruments, Inc., headquartered in Andover, MA, is a global provider of instruments, subsystems and process control solutions to manage critical parameters of advanced manufacturing processes. MKS’ products are derived from core competencies in pressure, vacuum and flow measurement and control, tool and chamber control, RF & DC power, reactive gas generation, gas delivery and composition analysis, and leak detection. MKS’ primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications. MKS operates an extensive network of customer support and service centers around the world.
Granville-Phillips Customers
As a part of MKS, Granville-Phillips is looking forward to continuing to support our customers. If you need to contact Granville-Phillips for general information, service or support call: +1 303-652-4400 and an operator will direct your call or you can send email to mks@mksinst.com
Visit: http://www.mksinst.com/Granville-Phillips
Call: +1 303-652-4400
Send Email: mks@mksinst.com
Japan
Visit:
http://mksinstruments.co.jp
Call: 03-3988-8193
Fax: 03-3398-8197
Send Email: mks-japan@mksinst.com
