The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
Key Features
- Fast Regen™ capability that extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
- An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
- Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
On-Board Cryopump Model
|
4F
|
8
|
8F
|
10
|
10F
|
250F
|
400
|
500
|
Pumping Speeds - liters/sec.
|
|
Water Vapor
|
1,100
|
4,000
|
4,000
|
9,000
|
9,500
|
6,500
|
17,500
|
30,000
|
Air
|
370
|
1,500
|
1,500
|
3,000
|
|
2,200
|
6,000
|
10,000
|
Hydrogen
|
370
|
2,500
|
2,200
|
5,000
|
|
3,200
|
12,000
|
12,000
|
Argon
|
310
|
1,200
|
1,200
|
2,500
|
|
1,800
|
5,000
|
8,400
|
Capacity - std. liter
|
|
Argon
|
210
|
1,000
|
1,000
|
2,000
|
|
1,000
|
2,500
|
6,000
|
Hydrogen (5x10-6 Torr)
|
3
|
17
|
12
|
24
|
24
|
16
|
42
|
45
|
Nominal Regeneration Time (cold to cold)
|
|
First & Second Stage
|
75 min.
|
2.5 hrs
|
2.5 hrs
|
2.5 hrs
|
2.5 hrs
|
<3.3 hrs
|
3 hrs
|
<3.8 hrs
|
Second Stage
|
<1 hr
|
<1 hr
|
<1 hr
|
<1 hr
|
<1 hr
|
<1.5 hrs
|
<1.5 hrs
|
|