The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
Key Features
- Fast Regen™ capability that extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
- An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
- Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
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On-Board Cryopump Model
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4F
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8
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8F
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10
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10F
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250F
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400
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500
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Pumping Speeds - liters/sec.
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|
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Water Vapor
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1,100
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4,000
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4,000
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9,000
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9,500
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6,500
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17,500
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30,000
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Air
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370
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1,500
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1,500
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3,000
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2,200
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6,000
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10,000
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Hydrogen
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370
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2,500
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2,200
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5,000
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3,200
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12,000
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12,000
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Argon
|
310
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1,200
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1,200
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2,500
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1,800
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5,000
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8,400
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Capacity - std. liter
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|
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Argon
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210
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1,000
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1,000
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2,000
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1,000
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2,500
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6,000
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Hydrogen (5x10-6 Torr)
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3
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17
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12
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24
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24
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16
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42
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45
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Nominal Regeneration Time (cold to cold)
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|
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First & Second Stage
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75 min.
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2.5 hrs
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2.5 hrs
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2.5 hrs
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2.5 hrs
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<3.3 hrs
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3 hrs
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<3.8 hrs
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Second Stage
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<1 hr
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<1 hr
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<1 hr
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<1 hr
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<1 hr
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<1.5 hrs
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<1.5 hrs
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