CTI-Cryogenics and Polycold Products

Brooks Automation offers a wide range of high performance and energy efficient cryogenic products for the semiconductor, display, R&D and general vacuum industries. Applications include ultra-high vacuum generation for semiconductor process equipment, rapid water vapor cryo-pumping for display and other vacuum coating equipment, closed loop cryogenic refrigeration systems, large scale vacuum chambers for space simulation, and small scale R&D applications for vacuum and temperature control.


Brooks Automation leads the market in advanced cryopumps
for the semiconductor industry.