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  • Products & Solutions
    • Semiconductor
      Featured Product
      Spartan 300 Sorter 4 I/O
      Spartan™ 300mm 4 I/O Sorter
       
        • Wafer Handling Robotics
           
          • Vacuum Robots
             
            • MagnaTran® 7 BiSymmetrik™
              MagnaTran 7 BiSymmetrik Robot
              MagnaTran® 7 BiSymmetrik™
              The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million.
            • MagnaTran® 7 Frogleg™
              MagnaTran 7 Frogleg Robot
              MagnaTran® 7 Frogleg™
              The MagnaTran® 7 Frogleg™ (MAG 7 F) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
            • MagnaTran® 7 Leapfrog®
              MagnaTran 7 Leapfrog Robot
              MagnaTran® 7 Leapfrog®
              The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications.
            • MagnaTran® 7 SCARA
              MagnaTran 7 SCARA Robot
              MagnaTran® 7 SCARA
              The MagnaTran® 7 SCARA (MAG 7) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
            • MagnaTran® 8 QuadraFly
              MagnaTran 8 QuadraFly Robot
              MagnaTran® 8 QuadraFly
              The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter.
            • MagnaTran® 8 Radius™
              MagnaTran 8 Radius Robot
              MagnaTran® 8 Radius™
              The dual arm MagnaTran® 8 Radius™ robot extends the benefits of MagnaTran field-proven direct drive technology to a tri-axial drive. In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter.
        • Wafer Handling Systems
           
          • Vacuum Systems
             
            • VCE Load Locks
              VCE
              Vacuum Cassette Elevator (VCE) Load Locks
              Available in four styles to suit your wafer fabrication environment, the VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing to enable safe, clean AGV, RGV, or human operator transfer of up to 200mm SEMI standard wafer cassettes.
            • Marathon™ 2 Transport System
              Marathon 2
              Marathon 2 Transport System
              Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements.
            • Marathon™ Express
              Marathon Express
              Marathon Express Vacuum Transport System
              The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications.
          • Atmospheric Systems
             
            • Jet™ Atmospheric Transport System
              Jet 2
              Jet Atmospheric Transport System
              Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.
        • RFID & IR Asset Tracking
        • Factory Automation Solutions
           
          • Spartan Sorters
            Spartan 300mm Sorter 4 I/O
            Spartan Sorters
            This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
          • Load Ports
             
            • IsoPort™ 300 Load Port
              IsoPort
              IsoPort 300 Load Port
              Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to 300mm wafers.
            • Vision™ 300 Load Port
              Vision Loadport with FOUP
              Vision 300 Load Port
              The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration.
            • Certon™ 450 Load Port
              Certon 450mm Load Port
              Certon™ 450 Load Port
              The Certon™ 450mm Load Port is compliant to 450mm FOUP, FOSB, and MAC (Multi Application Carrier) standards.
          • Reticle Handling
             
            • M2 Reticle Changers
              M2 Reticle Changers
              M2 Reticle Changers
              The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
            • Narrow Reticle Indexer
              Narrow Reticle Indexer
              Narrow Reticle Indexer
              Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
          • SMIF Solutions
             
            • SMIF Load Port Transfer (LPT)
              SMIF Loadport Transfer
              SMIF Load Port Transfer (LPT)
              Ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools.
            • SMIF-INX Indexers
              SMIF INX Indexers
              SMIF-INX Indexers
              Designed to supply wafer indexing for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafer handlers.
            • VersaPort™ 2200 Load Port
              VersaPort 2200 SMIF Load Port
              VersaPort 2200 Load Port
              The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.

    • Semiconductor Contamination Control
      Featured Product
      M800
      M800 Fully-Automatic300mm FOUP Cleaner
       
        • Cleaning Equipment
          • FOUP/Pod Cleaners
             
            • M800 300mm FOUP Cleaner
              M800
              M800 300mm FOUP Cleaner
              The M800 fully-automatic 300mm FOUP cleaner combines best particle and AMC cleaning performance and provides humidity control at the highest throughput.
            • M330 Fully-Automatic FOUP Cleaner
              M330 FOUP Cleaner
              M330 FOUP Fully-Automatic Cleaner
              The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and cost-efficiency.
            • M600 Automatic Pod Cleaner
              M600
              M600 Automatic Pod Cleaner
              The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.
            • M300 Semi-Automatic FOUP/Pod Cleaner
              M300
              M300 Semi-Automatic FOUP/Pod Cleaner
              The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.
          • EUV Pod Cleaner
             
            • M1000 EUV Pod Cleaner
              M1000
              EUV Pod Cleaner
              The M1000 fully-automatic EUV pod cleaner provides maximum performance by individual cleaning of each EUV or RSP200 part.
        • Clean Storage
          • Reticle Stockers
            • M1500 Semi-Automatic
              M1500
              M1500 Semi-Automatic Reticle Box Stocker
              The Brooks semi-automatic M1500 reticle box stocker stores up to 1,500 reticles in its cases. The reticle box ID is identified and the data file is logged in the database.
            • M1900 Reticle Stockers
              M1900 Fully Automatic
              M1900 Reticle Stockers
              Four variations of M1900 Reticle Stockers: Fully-Automatic Semi-Bare, Fully-Automatic RSP150, Fully-Automatic EUV POD Stocker, Semi-Automatic.
          • Reticle Storage
            Reticle Storage
            • RPS-C Automated Storage and Management System for SMIF Pods
              RPS-C Automated storage and management system for SMIF pods
              RPS-C Automated Storage and Management System for SMIF Pods
              The RPS-C is a fully automated standalone storage and inventory management system for reticle SMIF pods (RSP) with optional xCDA or N2 purge.
            • RS Bare Reticle Stocker Family
              RS Scalable high density bare reticle stocker family
              RS Bare Reticle Stocker Family
              The RS family provides a fully automated reticle management system that combines a sorter with a stocker capacity up to 2900 reticles.
            • RS-C Reticle Storage and Inspection System
              RS-C Flexible and scalable reticle storage and inspection system
              RS-C Reticle Storage and Inspection System
              The RS-C is a fully automated, highly flexible standalone storage and inspection system for 6".
            • RX Reticle Stocker and Carrier Buffer
              RX The innovative combination of reticle stocker and carrier buffer
              RX Reticle Stocker and Carrier Buffer
              The RX family is an innovative combination of reticle stocker and carrier buffer for managing the reticles throughout the fab.
            • RXi Reticle Inspection, Sorting and Storage Platform
              RXi Reticle inspection, sorting and storage platform
              RXi Reticle Inspection, Sorting and Storage Platform
              The RXi is a fully automated standalone inspection system for 6”.
        •  
          • Wafer Carriers & Boxes
            • Reticle Boxes
              Mega Optical Case
              Reticle Boxes
              • Mega Optical Case
              • A Rapid
              • B Ultra
              • C Swift
              • D Twin
              • Customized
            • Wafer Carriers
              Wafer Carrier 8"
              Wafer Carriers
              • 6" Wafer Carrier
              • 8" Wafer Carrier
            • Wafer Transport Boxes
              Wafer Carrier Transport Box
              Wafer Transport Boxes
              • 200mm Wafer Transport Box
              • 200mm Single Wafer Transport Box
          • Reticle Handling
             
            • M2 Reticle Changers
              M2 Reticl Changers
              M2 Reticle Changers
              The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
            • Narrow Reticle Indexer
              Narrow Reticle Indexer
              Narrow Reticle Indexer
              Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.

    • Life Sciences

  • Services
    • Semiconductor

    • Life Sciences

  • Company
    • About Brooks
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
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    • Contact Us & Global Offices
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
        • Contact Us & Global Offices
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    • Corporate Responsibility
        • Corporate Responsibility
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            • Governance and Ethics
            • Product Responsibility
            • Social Impact
            • Sustainability

    • News & Events
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
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    • Investors
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       

    • Careers
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
        • Careers
           
           

  • My Brooks
      • Shipping

        Warranty Shipping Policy for New Products, Repairs and Spares.

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          Track your shipment.
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        Tools and information for Brooks Suppliers.

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          Purchase Terms and Conditions in English, German and Japanese.
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          Supply Chain Social and Environmental Responsibility Policy
        • Supplier Initiated Action Request

          Supplier Initiated Action Request (SIAR) web form.

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