The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million.
The MagnaTran® 7 Frogleg™ (MAG 7 F) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications.
The MagnaTran® 7 SCARA (MAG 7) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter.
The dual arm MagnaTran® 8 Radius™ robot extends the benefits of MagnaTran field-proven direct drive technology to a tri-axial drive. In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter.
Available in four styles to suit your wafer fabrication environment, the VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing to enable safe, clean AGV, RGV, or human operator transfer of up to 200mm SEMI standard wafer cassettes.
Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements.
The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications.
Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.
This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to 300mm wafers.
The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration.
The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
Ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools.
The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.
The M800 fully-automatic 300mm FOUP cleaner combines best particle and AMC cleaning performance and provides humidity control at the highest throughput.
The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and cost-efficiency.
The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.
The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.
The Brooks semi-automatic M1500 reticle box stocker stores up to 1,500 reticles in its cases. The reticle box ID is identified and the data file is logged in the database.
The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
