Atmospheric & Vacuum Robots Refurbishment Services

Brooks offers vacuum and atmospheric robot refurbishment services for the following products in these locations:

Chelmsford, Massachusetts, USA

Jena, Germany

ABM 105
ABM-200, 300 & ABM-400
AcuLine
Aqua Tran
ATM105-1-CE
ATM-200, 300 & 400
Axis Arms 3, 4 & 5
DBM 2700, 2406 & 2407
FIXLOAD 5
IRT
Load Ports
MagnaTran / Mag 7
MagnaTran / Mag 8
MTR 5 / VTR 5
Pre-200 & Pre-300
Razor
Reliance Drives
Series 8 Controllers
Tracks
VAC-407
VCE 6 & VCE 4
VCE Lift Modules
Vision Load Port
WTM-107
WTM-511
ABM 105
ABM-200, 300 & ABM-400
Aculiner
ATM105-1-CE
ATM-200, 300 & 400
DBM 2700, 2406 & 2407
ERGOSPEED 3600
ERGOSPEED 3800
Filter-Fan-Units
FIXLOAD
FIXMAP
ISE 150
ISE R150 (Reticle Indexer)
ISE200
MagnaTran / Mag 7
MTR 5 / VTR 5
MTX 300mm Sorter
Pre-200 & Pre-300
Reliance
SSM200, 200mm SMIF Sorter
Tracks
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Shanghai, China

Korea

AcuLiner
ATM-400, ABM-400
DBM 2406
Equipe Controller
MagnaTran / Mag 7
MagnaTran / Mag 8
PreAligner 300
Reliance ATR8
Series 8 Controller
VCE 4
Aculiner
Aligner controller
Arm Set
AXM
DBM
MagnaTran / Mag 60 series
MagnaTran / Mag 7
MagnaTran / Mag 70 series
MagnaTran / Mag 74
MagnaTran / Mag 8
MTR / VTR 5
Reliance
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Hsin Chu, Taiwan

AXM
MagnaTran / Mag 7
Reliance