CTI-Cryogenics On-Board® IS Cryopumps

Repair-Refurbishment Services

IS 320 FX

The Brooks CTI-Cryogenics intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.

The Brooks Advantage

  • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
  • Original Equipment Manufacturer: product technical experts and design engineers
  • Repairs available in all regions that have major semiconductor fabs
  • One year comprehensive warranty on all repair levels
  • Repair Levels:
  • Exchange seed units available in all regions
  • Upgrades and CIP added to repairs
  • ISO Certified repairs using only Brooks parts
  • Uniform global repairs processes to maintain consistent quality and performance
  • Fixed lead times for all products, independent of service level
  • Customized repair agreements available for all robots

On-Board Cryopump Repair-Refurbishment Options

Service Levels Models Lead Times
Refurbishment Covers all the active models: On-Board IS 8, 8F, 8F XP, 250FE, 320FE, 320FX 3-4 Weeks
Advance Exchange Covers all the active models: On-Board IS 8, 8F, 8F XP, 250FE, 320FE, 320FX 5-7 Business Days
1-Day Rapid Response Exchange Covers most active models. * Next Business Day

* Please contact us for availability.

A Brooks Certified Repair is the right choice for customers who want professional high quality services. These repairs are designed to optimize aging product performance and achieve optimal lifetime for all your cryogenic needs.

On-Board Cryopump Repair Features

  • Performance upgrade options available
  • Advanced evaluation diagnostic tools
  • Automated testing suites
  • Adherence to copy exact
  • In-depth failure analysis options

Proactive Agreements

For larger installed base customers, service agreements are available coupled with either the Enhanced Preventative Maintenance or Refurbishment service level to include exchange units. These agreements provide readily available spare units to support your operational up time requirements. This program helps customers manage equipment maintenance proactively to reduce unexpected down time, while the fixed price allows your operation to budget and forecast its maintenance expense.