Transfer Robot for High Throughput Applications in Vacuum Cluster Tools
The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million.
The simple design has a minimum of moving parts. Its direct magnetic drive has no dynamic vacuum seals thus reducing friction, wear, tear, and torque resulting in fewer failures. Less vibration, low particles, and high positional accuracy without edge contact are achieved by the elimination of stepper motors. The integral, field-proven, control electronics not only provides a smaller footprint but also a lower susceptibility to electronic interference resulting in higher reliability.
- Handles wafer sizes through 300mm
- Patented BiSymmetrik Arm with dual end effectors
- Compact, direct drive technology with no dynamic seals, drive belts or cables
- Integrally mounted, DSP based control electronics
- Patented Time optimal Trajectory
- Advanced firmware for local and remote monitoring and diagnostics
- CE and SEMI S2 compliant
- Compatible with state-of-the-art cluster tools
- Very high throughput
- Compact footprint
- VHV compatibility
- Low cost of ownership
- Maximum operating speed
- Global serviceability
- Safer recovery from power loss
Ultra high throughput is achieved by use of Time Optimal Trajectory™ algorithms which result in transfer speeds 15-30% faster than s-curve profiles. The continuous rotation capability precludes the need for moves of more than 180 degrees and the direct drive servo with Brooks’ proprietary DSP controller minimizes vibration. The MAG 7 B robot's patented BiSymmetrik arm enables wafer exchange and buffering.
The PASIV™ user programmable safety zones prevent possible collision during manual operation thus insuring the safety of high value wafers and process equipment.Comprehensive diagnostics are accomplished with a graphic interface at a remote, modem linked, service terminal. Error logging with prior events are time and date stamped. Cycle counters are in non-volatile memory and critical performance characteristics are monitored graphically. Multi-Sensor Interfacing is accomplished by high speed Digital I/O which enables a direct interface to substrate sensors and other peripheral modules such as valves.