Razor™ Atmospheric Transfer Robot & Modules

Brooks atmospheric robots and modules are an integral part of high-performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends for semiconductor material handling applications. A technology and performance leader, Brooks offers cutting-edge robotics solutions that enable new levels of tool precision while accelerating installation and set-up for each tool shipment. Leveraging multiple generations of industry-leading automation standards.

Data Sheet Razor Family Brochure

Razor robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations. The Brooks kinematic mounting system, patented motion control technology, and reliable direct drive robotics enable fast set-up, high repeatability, and maximum uptime. In addition, Razor robots feature simplified, highly efficient arm architecture with two links instead of three for a 3-FOUP trackless robot that delivers reliable performance — even in high-volume, 24x7 production environments.

Stay on the cutting edge with atmospheric transfer robots that deliver:

  • Proprietary motion control algorithms — Time Optimized Trajectory and Time Optimal Path — that optimize motion profiles for maximum throughput
  • Support for a choice of wafer handling technologies, including high throughput, high cleanliness, Passive Edge Contact solutions
  • Fifth-generation direct drive technology that minimizes part count, extends product life, and significantly reduces vibration
  • Powered by Fusion Controls, the industry’s most flexible, configurable motion control solution
  • Optional kinematic mounting system with one-time height and level adjustment

Brooks atmospheric robots and modules are an integral part of high-performance atmospheric wafer handling solutions in Process Equipment and Cluster Tool Front Ends for semiconductor material handling applications. A technology and performance leader, Brooks offers cutting-edge robotics solutions that enable new levels of tool precision while accelerating installation and set-up for each tool shipment. Leveraging multiple generations of industry-leading automation standards, Brooks atmospheric robots and modules provide the optimized mix of throughput, repeatability, and cleanliness required for today’s advanced manufacturing processes.

Leverage the Razor Traverser’s high-speed horizontal motion to give your Razor robot access to multiple process tool, load ports and cassette staging locations within your fab. The Razor Traverser takes advantage of the Brooks patented direct drive technology to deliver superior reliability and smooth motion control for the lowest possible vibration and particle contamination. At the same time, it operates at high speeds designed to keep pace with the other high-performance Razor modules.

Like all Razor products, the Traverser takes advantage of the Fusion™ Controls automation control solution to enable easy configuration for meeting a wide variety of tool application requirements.

Key Features

  • High reliability for up to 10M MCBF performance
  • Fifth-generation direct drive technology
  • Patented motion control algorithms for reduced vibration
  • Pre-packaged templates for fast tool configuration
  • Compliance with SEMI and other industry standards