M600 Automatic Pod Cleaner

The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of FOUP, FOSB or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.

Key Features

  • Fully-automated cleaning of FOUP or RSP200
  • Semi-automated cleaning of all kind reticle/wafer carrier
  • Internal buffer
  • IR drying technology
  • Manual operation possible
  • OHT interface
  • Class 1 mini-environment & ESD
  • SEMI standard compliant SECS/GEM interface