M2400 300mm Wafer Stocker

The Brooks M2400 is a fully-automatic 300mm wafer stocker that stores up to 1,200 wafers. Wafers are stored vertically in compartments and managed in individual zones to avoid cross contamination. It provides fast access to each individual wafer and can act as a sorter.

Key Features

  • Fully-automated wafer handling
  • Class 0.1 mini-environment/ESD/AMC
  • N2/XCDA purge in re-circulation mode
  • High density 1/4 pitch storage in plastic molded compartment
  • Wafer alignment with OCR for wafer history management
  • Wafer sorter function
  • Auto-teaching