M2200 300mm Wafer Stocker

The Brooks M2200 is a fully-automatic 300mm wafer stocker that stores up to 2,300 wafers. Wafers are stored vertically in compartments and managed in individual zones to avoid cross contamination. It provides fast access to each individual wafer and can act as a sorter.

Key Features

  • Fully-automated wafer handling
  • ISO Class 2 mini-environment
  • ESD and AMC controlled
  • N2/XCDA purge in re-circulation mode
  • Encapsulated temperature and humidity controlled environment
  • High density 1/4 pitch storage in plastic molded compartment
  • Wafer alignment with OCR for wafer history management
  • FOUP buffer for lot preparation
  • Wafer sorter function
  • Auto-teaching