M2100 200mm Wafer Stocker

The Brooks M2100 is a fully-automated 200mm wafer stocker that stores up to 2,200 wafers. Wafers are stored horizontally in compartments and managed in zones to avoid cross contamination. It provides fast access to each individual wafer and can act as a sorter.

Key Features

  • Fully-automated wafer handling
  • Class 1 mini-environment/ESD/AMC
  • Wafer alignment with OCR
  • Wafer sorter function
  • Auto-teaching