M1995 Fully-Automatic Bare Compartment Reticle Stocker

The Brooks M1995 is a fully-automatic compartment stocker that stores up to 2,860 reticles. Reticles are stored horizontally in compartments in an ultra-clean recirculated purged mini environment. In addition, the reticle storage compartments receive a purified gas purge. Individual I/O stations to accommodate all types of reticle boxes.

Data Sheet

Key Features

  • Fully-automated reticle/mask handling
  • N2/XCDA purge in re-circulation mode for best haze/crystal grow reduction
  • Encapsulated temperature and humidity controlled environment
  • Class 1 ISO mini-environment/ESD/AMC
  • Purge into compartment
  • Small footprint
  • OHT interface
  • N2 blow off
  • Embedded metrology tool
  • Earthquake proof compartment storage
  • Buffer module