M1990 Fully-Automatic Bare Reticle Stocker

The Brooks M1990 is a fully-automatic bare stocker that stores up to 2,016 reticles. Reticles are stored vertically on anti-static support in an ultra-clean recirculated purged mini environment. Individual I/O stations to accommodate all types of reticle boxes.

Data Sheet

Key Features

  • Fully-automated reticle/mask handling
  • N2/XCDA purge in re-circulation mode
  • Encapsulated temperature and humidity controlled environment
  • Class 1 ISO mini-environment/ESD/AMC
  • High capacity - smallest footprint
  • OHT interface
  • N2 blow off
  • Embedded metrology tool
  • Buffer module