Video: M2-Nano Vacuum Transport System Cluster Tool

The M2-Nano vacuum transport system is that latest addition to the Brooks Marathon-2 line of high productivity cluster tools. This video reveals the vacuum back end portion of the M2-Nano System (without the necessary EFEM). Visible are the high-speed Load Lock and the extremely compact Transfer Chamber, housing the industry - leading MagnaTran-7 vacuum robot. The support Frame includes full facilities for up to three Process modules, and features a CE-compliant Safety-Hub communication/interlock architecture.