Video: 450mm Equipment Front End Module (EFEM)

The 450mm Equipment Front End Module (EFEM) unit shown is configured with one 300mm Load Port and two 450mm Load Ports, indicating the capability to handle both wafer sizes.  Wafers are visible within a 450mm FOUP placed on the Load Port.  Once the pod door is opened, the atmospheric robot begins the handling sequence by picking two Wafers.  Internal views of the EFEM than show the wafers being aligned and subsequently being placed to the vacuum load lock of a 450mm Vacuum Transport System.