SMIF Load Port Transfer (LPT)

The SMIF-LPT (Load Port Transfer) is an ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools. The SMIF-LPT is designed for adaptive and equipment manufacturer applications for vacuum load-lock tools, which require an external lateral cassette transfer mechanism.

The SMIF-LPT provides SMIF capability for a wide variety of wafer fab tools and leads the industry in reduced cycle time and reduced footprint.

Adaptive SMIF-LPT Solutions

Brooks adaptive SMIF-LPT solutions for open cassette 200 mm process, metrology and inspection tools offer cost-effective upgrades of non-SMIF tools to SMIF, thereby enabling the conversion of existing 200 mm facilities for semiconductor manufacturing at technology nodes below 180 nm. The three configurations address original equipment manufacturer (OEM) tools with difficult cassette landing stages:

  • SMIF-LPT Tr is a rotational head designed for non-perpendicular cassette placement
  • SMIF-LPT Tx offers a lateral cassette motion to address narrow cassette-to-cassette spacing
  • SMIF-LPT Ty has an offset arm to accommodate narrow chamber openings
  • These features can also be combined or upgraded on an existing SMIF-LPT
  • A robust kinematic interface provides quick, accurate, and reliable mounting and removal (a hinge and latch option is available for equipment manufacturer integration).
  • Wafer sensing and reseating system prevents wafer breakage.
  • Wafer transfer is accomplished in a better than Class 1 mini-environment which ensures maximum protection from particulate contamination.
  • Fast load and unload cycle time leads industry.
  • Integrated SMART-Tag Auto ID provides lot tracking and control.
  • Installed base of over 12,000 LPT/LPI units.

Maximum Productivity & Profitability

  • A robust kinematic interface provides quick, accurate, and reliable mounting and removal (a hinge and latch option is available for equipment manufacturer integration).
  • Wafer sensing and reseating system prevents wafer breakage.
  • Wafer transfer is accomplished in a better than Class 1 mini-environment which ensures maximum protection from particulate contamination.
  • Fast load and unload cycle time leads industry.
  • Integrated SMART-Tag Auto ID provides lot tracking and control.
  • Installed base of over 12,000 LPT/LPI units.