The Reliance ATR family of robots provide the proven performance, reliability, and ultra-cleanliness and utilizes direct drive technology and DSP-based control electronics.
Razor robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations. The Brooks kinematic mounting system, patented motion control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime.
High-performance atmospheric Razor Aligner provides ultra-precise wafer positioning of 200mm, 300mm, or 450mm wafers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time.
Footprint optimal solution for small Equipment Front End Modules (EFEMs), especially when edge grip handling is required. The YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.
Highly efficient, fast swap solution, especially when combined with linear motor track options. YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.
The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million.
The MagnaTran® 7 Frogleg™ (MAG 7 F) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications.
The MagnaTran® 7 SCARA (MAG 7) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter.
The dual arm MagnaTran® 8 Radius™ robot extends the benefits of MagnaTran field-proven direct drive technology to a tri-axial drive. In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter.
The InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm SEMI-standard and Jeida-standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square.
The industry’s most flexible and complete automation control solution. Fusion Controls deliver maximum performance and uptime. They are fully customizable and remarkably easy to use, while accelerating time to market and tool profitability.
Available in four styles to suit your wafer fabrication environment, the VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing to enable safe, clean AGV, RGV, or human operator transfer of up to 200mm SEMI standard wafer cassettes.
Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements.
The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications.
Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.
This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to 300mm wafers.
The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration.
The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
Ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools.
The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.
The M800 fully-automatic 300mm FOUP cleaner combines best particle and AMC cleaning performance and provides humidity control at the highest throughput.
The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and cost-efficiency.
The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of FOUP, FOSB or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.
The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.
The Brooks semi-automatic M1500 reticle box stocker stores up to 1,500 reticles in its cases. The reticle box ID is identified and the data file is logged in the database.
The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
Intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.
On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. For added flexibility, you can add your own customized controls and supporting peripherals to meet your specific application needs.
On-Board Waterpumps are high-performance vacuum pumps that increase water vapor pumping speeds to substantially improve system throughput and provide better process results.
Brooks CTI-Cryogenics offers a choice of compressors designed to provide optimum performance with On-Board Cryopumps, Cryo-Torr Cryopumps and/or On-Board Waterpumps. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications for all Brooks vacuum pumps.
Provides a compact, easy-to-use alternative to liquid nitrogen in small vacuum systems. These cryogenerators effectively eliminate the cost, inconvenience, and hazards associated with using liquid nitrogen — while delivering comparable performance.
The PCC Compact Cooler is a compact, high-performance cooling system that brings new levels of efficiency and reliability to demanding applications such as high-resolution digital imaging, analytical chemistry, life sciences, materials analysis, semiconductor inspection, scientific research and water vapor cryotrapping.
PGC Gas Chillers cool compressed dry gases, such as nitrogen, argon or air, from ambient to cryogenic temperature without pre-cooling. PGC Gas Chillers are closed-loop refrigeration systems that cool a non-recirculating gas stream using a refrigerant to gas tube-in-tube heat exchanger.
Polycold MaxCool Cryochillers are closed loop cryogenic refrigeration systems that provide up to 2,500 watts or 4,000 watts of cooling, respectively. These cryochillers can be used to capture water vapor and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. MaxCool cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing.
The Brooks Polycold® PFC Water Vapor Cryochiller effectively captures water vapor, which typically comprises 65% to 95% of the gas load in high vacuum systems. It pumps vapor within minutes of “start,” defrosts in less than four minutes, and lowers water vapor partial pressure during processing for higher quality, better adhesion, and more reproducible deposition.
Cryodyne Refrigeration Systems are a family of two-stage, closed-cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle. They offer usable heat lift from <10K to >80K, making them highly suitable for a variety of commercial and research applications.
The AcuLigner™ atmospheric robot is an integral part of the Brooks Automation high performance atmospheric wafer handling solutions. Utilizing direct drive technology and on-board controls, these systems play a key role in your performance and productivity. Extensive downtime due to repair is not an option. That’s why Brooks has created a Fixed Price Repair program to support the AcuLigner product.
Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the AcuTran/AquaTran 7 family of robots.
The MTR 5 M model MultiTran® 5 robot with the Brooks patented BiSymmetrik™ arm and dual SEMI/MESC compatible end effectors is a vacuum wafer handling robot which enables high throughput handling in isolated cluster tools.
The VTR 5 M model VacuTran™ 5 robot is a high reliability wafer-handling robot with a SEMI/MESC compatible arm and end effectors. The VTR 5 M is a top mounting robot with a single arm configuration for application in large transport chamber modules such as those in cluster tools.
Razor’s modular design allows customers to customize their field-replaceable unit (FRU) package to align with their mean-time-to-repair (MTTR) strategy and keep unscheduled downtime to a minimum. Brooks offers a Fixed Price Repair program to support the Razor robot.
With the Reliance ATR, lengthy repair cycle times can lead to increased costs and unscheduled downtime. For this reason Brooks has developed a Fixed Price Repair program to support the Reliance ATR.
The MagnaTran® 7 (MAG 7) robot is the most advanced and reliable robot for operation in vacuum and isolation environments such as cluster tools. Reliability is proven at > 11.5 MCBF. With the MagnaTran 7 lengthy repair cycle times can lead to increased costs and unscheduled downtime. This is why Brooks created a Fixed Price Repair program to support the MagnaTran 7 robot.
Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the MagnaTran 8 family of vacuum robots.
Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the robot controllers, to work with the AXM, DBM, AquaTran™/AcuTran® and Reliance™ ATR™ robot families.
