Brooks Automation
  • Feedback
  • Global Offices
Home>Products & Solutions>Semiconductor Automation>Factory Automation Solutions>Load Ports

Semiconductor Automation

Products & Solutions
  • Semiconductor Automation
    • Wafer Handling Robotics
    • Wafer Handling Systems
    • Semiconductor Contamination Control
    • Factory Automation Solutions
      • Spartan Sorters
      • Load Ports
        • IsoPort™ I/O Port
        • Vision™ Load Port Module
        • Certon™ 450 Load Port
      • Reticle Handling
      • SMIF Solutions
    • Asset Tracking & RFID

Load Ports

IsoPort Load Port
IsoPort I/O Port
Vision Load Port Modules
Vision™ Load Port Modules
Certon 450 Loadport
Certon™ 450 Load Port
Copyright © 1993-2018 Brooks Automation, Inc.
Terms of Use  |   Sitemap  |   Privacy And Security Policy  |   Feedback  |   Contact Us

Facebook  Twitter  LinkedIn  Google Plus  YouTube

 

  • Products & Solutions
    • Semiconductor Automation
      Featured Product
      Spartan 300 Sorter 4 I/O
      Spartan™ 300mm 4 I/O Sorter
       
        • Wafer Handling Robotics
           
          • Atmospheric Robots
             
            • Reliance ATR Robot
              Reliance ATR Atmospheric Robot
              Reliance ATR Robot
              The Reliance ATR family of robots provide the proven performance, reliability, and ultra-cleanliness and utilizes direct drive technology and DSP-based control electronics.
            • Razor™ Atmospheric Transfer Robot & Modules
              Razor Robot FOUP
              Razor™ Atmospheric Transfer Robot & Modules
              Razor robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations. The Brooks kinematic mounting system, patented motion control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime.
            • Razor™ Aligner
              Atmospheric Razor Aligner
              Razor Aligner
              High-performance atmospheric Razor Aligner provides ultra-precise wafer positioning of 200mm, 300mm, or 450mm wafers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time.
            • Yaskawa MR124 Robot
              Yaskawa Robots
              Yaskawa MR124 Robot
              Footprint optimal solution for small Equipment Front End Modules (EFEMs), especially when edge grip handling is required. The YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.
            • Yaskawa M201 Robot
              Yaskawa M201 Atmospheric Robot
              Yaskawa M201 Robot
              Highly efficient, fast swap solution, especially when combined with linear motor track options. YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.
          • Vacuum Robots
             
            • MagnaTran® 7 BiSymmetrik™
              MagnaTran 7 BiSymmetrik Robot
              MagnaTran® 7 BiSymmetrik™
              The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million.
            • MagnaTran® 7 Frogleg™
              MagnaTran 7 Frogleg Robot
              MagnaTran® 7 Frogleg™
              The MagnaTran® 7 Frogleg™ (MAG 7 F) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
            • MagnaTran® 7 Leapfrog®
              MagnaTran 7 Leapfrog Robot
              MagnaTran® 7 Leapfrog®
              The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications.
            • MagnaTran® 7 SCARA
              MagnaTran 7 SCARA Robot
              MagnaTran® 7 SCARA
              The MagnaTran® 7 SCARA (MAG 7) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
            • MagnaTran® 8 QuadraFly
              MagnaTran 8 QuadraFly Robot
              MagnaTran® 8 QuadraFly
              The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter.
            • MagnaTran® 8 Radius™
              MagnaTran 8 Radius Robot
              MagnaTran® 8 Radius™
              The dual arm MagnaTran® 8 Radius™ robot extends the benefits of MagnaTran field-proven direct drive technology to a tri-axial drive. In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter.
          • Components
             
            • InLigner™
              Inligner
              InLigner
              The InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm SEMI-standard and Jeida-standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square.
            • Fusion™ Controls
              Fusion Control
              Fusion Controls
              The industry’s most flexible and complete automation control solution. Fusion Controls deliver maximum performance and uptime. They are fully customizable and remarkably easy to use, while accelerating time to market and tool profitability.
        • Wafer Handling Systems
           
          • Vacuum Systems
             
            • VCE Load Locks
              VCE
              Vacuum Cassette Elevator (VCE) Load Locks
              Available in four styles to suit your wafer fabrication environment, the VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing to enable safe, clean AGV, RGV, or human operator transfer of up to 200mm SEMI standard wafer cassettes.
            • Marathon™ 2 Transport System
              Marathon 2
              Marathon 2 Transport System
              Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements.
            • Marathon™ Express
              Marathon Express
              Marathon Express Vacuum Transport System
              The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications.
          • Atmospheric Systems
             
            • Jet™ Atmospheric Transport System
              Jet 2
              Jet Atmospheric Transport System
              Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.
        • RFID & IR Asset Tracking
        • Factory Automation Solutions
           
          • Spartan Sorters
            Spartan 300mm Sorter 4 I/O
            Spartan Sorters
            This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
          • Load Ports
             
            • IsoPort™ 300 Load Port
              IsoPort
              IsoPort 300 Load Port
              Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to 300mm wafers.
            • Vision™ 300 Load Port
              Vision Loadport with FOUP
              Vision 300 Load Port
              The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration.
            • Certon™ 450 Load Port
              Certon 450mm Load Port
              Certon™ 450 Load Port
              The Certon™ 450mm Load Port is compliant to 450mm FOUP, FOSB, and MAC (Multi Application Carrier) standards.
          • Reticle Handling
             
            • M2 Reticle Changers
              M2 Reticle Changers
              M2 Reticle Changers
              The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
            • Narrow Reticle Indexer
              Narrow Reticle Indexer
              Narrow Reticle Indexer
              Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
          • SMIF Solutions
             
            • SMIF Load Port Transfer (LPT)
              SMIF Loadport Transfer
              SMIF Load Port Transfer (LPT)
              Ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools.
            • SMIF-INX Indexers
              SMIF INX Indexers
              SMIF-INX Indexers
              Designed to supply wafer indexing for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafer handlers.
            • VersaPort™ 2200 Load Port
              VersaPort 2200 SMIF Load Port
              VersaPort 2200 Load Port
              The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.

    • Semiconductor Contamination Control
      Featured Product
      M800
      M800 Fully-Automatic300mm FOUP Cleaner
       
        • Cleaning Equipment
          • FOUP/Pod Cleaners
             
            • M800 300mm FOUP Cleaner
              M800
              M800 300mm FOUP Cleaner
              The M800 fully-automatic 300mm FOUP cleaner combines best particle and AMC cleaning performance and provides humidity control at the highest throughput.
            • M330 Fully-Automatic FOUP Cleaner
              M330 FOUP Cleaner
              M330 FOUP Fully-Automatic Cleaner
              The M330 Cleaner is a world-class fully-automatic FOUP-compatible system that provides superior washing and drying performance, operational ease and cost-efficiency.
            • M600 Automatic Pod Cleaner
              M600
              M600 Automatic Pod Cleaner
              The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of FOUP, FOSB or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.
            • M300 Semi-Automatic FOUP/Pod Cleaner
              M300
              M300 Semi-Automatic FOUP/Pod Cleaner
              The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.
            • M450 450mm FOUP/MAC Cleaner
              M450
              M450 450mm FOUP/MAC Cleaner
              The M450 fully-automatic 450mm FOUP/MAC cleaner combines best particle and AMC cleaning performance and provides humidity control.
          • EUV Pod Cleaner
            M1000
            EUV Pod Cleaner
            The M1000 fully-automatic EUV pod cleaner provides maximum performance by individual cleaning of each EUV or RSP200 part.
        • Clean Storage
          • Reticle Stockers
            • M1500 Semi-Automatic
              M1500
              M1500 Semi-Automatic Reticle Box Stocker
              The Brooks semi-automatic M1500 reticle box stocker stores up to 1,500 reticles in its cases. The reticle box ID is identified and the data file is logged in the database.
            • M1900 Reticle Stockers
              M1900 Fully Automatic
              M1900 Reticle Stockers
              Four variations of M1900 Reticle Stockers: Fully-Automatic Semi-Bare, Fully-Automatic RSP150, Fully-Automatic EUV POD Stocker, Semi-Automatic.
            • M1990 Fully-Automatic Bare
              M1995
              M1990 Fully-Automatic Bare Reticle Stocker
              The Brooks M1990 is a fully-automatic bare stocker that stores up to 2,016 reticles.
            • M1995 Fully-Automatic
              M1995
              M1995 Fully-Automatic Compartment Reticle Stocker
              The Brooks M1995 is a fully-automatic compartment stocker that stores up to 2,860 reticles.
            • M2090 Reticle Changer Stocker
              M2090
              M2090 Reticle Changer Stocker
              The Brooks M2090 Reticle Changer/Stocker is a reticle/mask exchange, inspection and stocker system.
            • ZARIS Reticle Automation System
              ZARIS Reticle Automation System
              ZARIS Reticle Automation System
              Reliably automates the handling of 5” and 6” reticles from a wide range of shipping and stepper cassettes.
          • Wafer Stockers
            Wafer Stockers
            • M2100 200mm
              M2100 125w
              M2100 200mm Wafer Stocker
              The Brooks M2100 is a fully-automated 200mm wafer stocker that stores up to 2,200 wafers.
            • M2200 300mm
              M2200
              M2200 300mm Wafer Stocker
              The Brooks M2200 is a fully-automatic 300mm wafer stocker that stores up to 2,300 wafers.
            • M2400 300mm
              M2400
              M2400 300mm Wafer Stocker
              The Brooks M2400 is a fully-automatic 300mm wafer stocker that stores up to 1,200 wafers
        •  
          • Wafer Carriers & Boxes
            • Reticle Boxes
              Mega Optical Case
              Reticle Boxes
              • Mega Optical Case
              • A Rapid
              • B Ultra
              • C Swift
              • D Twin
              • Customized
            • Wafer Carriers
              Wafer Carrier 8"
              Wafer Carriers
              • 6" Wafer Carrier
              • 8" Wafer Carrier
            • Wafer Transport Boxes
              Wafer Carrier Transport Box
              Wafer Transport Boxes
              • 200mm Wafer Transport Box
              • 200mm Single Wafer Transport Box
          • Reticle Handling
             
            • M2 Reticle Changers
              M2 Reticl Changers
              M2 Reticle Changers
              The Brooks M2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box etc.).
            • Narrow Reticle Indexer
              Narrow Reticle Indexer
              Narrow Reticle Indexer
              Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.

    • Life Science Solutions
      Featured Product
      BioStore™ III Cryo -190°C Storage
       
        • Sample Storage for Compound Management and Biostorage
           
          • Sample Lifecycle Management
            Sample Lifecycle Management
            Sample Lifecycle Management
            BioStorage Technologies, a subsidiary of Brooks, provides comprehensive sample lifecycle management solutions.
          • Automated Storage -80°C to RT
             
            • BioStore™ II -80°C
              BioStore II TwinBank 125
              BioStore™ II -80°C Automated Sample Storage
              Biostore II is designed for reliability, storage density and with a modular architecture to maximize adaptability. BioStore II offers you the expertise we’ve gained from 15 years of developing automated sample storage products for biobanking applications that range from DNA to blood serum storage.
            • SampleStore™ II -20° to RT Models
              SampleStore II
              SampleStore™ II -20°C to RT Automated Sample Storage
              SampleStore II is designed for reliability, storage density and with a modular architecture to maximize adaptability. SampleStore II offers you the expertise we’ve gained from 20 years of developing automated sample storage products for biobanking applications that range from compound storage for drug discovery to DNA and blood serum storage.
            • SampleStore™ III AC
              SampleStore III 125
              SampleStore™ III AC with Acoustic Tube Technology
              The SampleStore III AC system combines a new automated storage capability with transformational acoustic tube dispensing technology to create an ultra-high efficiency workflow.
            • Strata Software
              Strata Dashboard
              Strata Sample Management Software
              Using SampleStore II and BioStore II become completely intuitive with Brooks Strata store control software. The simplified user interface can be easily configured for day-to-day operation with more detail available via drill down and advanced screens for 'super users'.
          • Cryogenic Solutions -190°C
             
            • BioStore™ Cryo Semi-Automated Freezer -190°C
              BioStore Cryo 190C
              BioStore™ Cryo Semi-Automated Freezer -190°C
              The BioStore™ Cryo semi-automated LN2 starter system enables you to plan for and progress toward a fully automated liquid nitrogen sample storage system in the future.
            • BioStore™ III Cryo -190°C
              BioStore™ III Cryo -190°C
              The BioStore III Cryo provides customers who need cryogenic biological storage (-190°C vapor phase) with a solution that combines the highest sample protection, improved chain of custody management, and a superior user experience - all at an affordable price.
            • Cryogenic Sample Transport
              CryoPod Filling Station 125
              CryoPod™ Carrier & Filling Station

              The CryoPod™ carrier is a truly portable device that enables -150°C sample transportation over short distances. It is safe, reliable, and maintains the cold chain.

        •  

           
          • Instruments & Devices
             
            • FluidX IntelliXcap™ Decapper
              FluidX IntelliXcap™ Decapper

              The IntelliXcap™, a next generation universal capper/decapper with ‘intelligent’ technology that includes an advanced storage media detection sensor and a proprietary self-release cartridge mechanism. IntelliXcap simplifies workflow, reduces non-productive downtime, and has a significantly lower cost of operation.

            • Tube Auditor
              Tube Auditor
              Tube Auditor

              The Brooks Tube Auditor performs quick and easy Goods-In and Goods-Out QA checks to help ensure that your suppliers are providing what you ordered and that your customers are receiving what you promised.

            • XSD-1, single tube capper/decapper
              XSD-1, single tube capper/decapper

              The XSD-1 is the first-of-its-kind single tube capper/decapper in the industry. It provides a low-cost, reliable solution for managing the automated capping and decapping of single of larger sized master sample tubes such as centrifuge, cell culture and even glass tubes.

            • Microplate, Microtube & Vial Handling
              XPeel
              Microplate, Microtube & Vial Handling
              • Xpeel Automated Microplate Seal Removal
              • Microtube Punching & Selecting 
              • Seal Piercing on Microtubes & Microplates 
              • Microplate & Microtube Sealing
              • Scan X 2D™ Microtube Plate Barcode Scanner
            • Plant Sampling
              PlantTrak Hx 125w
              Plant Sampling
              • PlantTrak Hx™ Handheld Plant Sampling & Barcoding
              • PlantTrak Lx™ Benchtop Plant Sampling & Barcoding
              • PlantTrak Sx™ Benchtop Single Magazine Unloader
              • PlantTrak Mx™ Benchtop Multiple Magazine Unloader
               
          • Consumables
             
            • p-Chip® Sample Tube Tracking
              p-Chip sample tracking 125w
              p-Chip® Sample Tube Tracking
              Storage tubes with p-Chip technology ensure reliable sample information, tracking, and security in challenging cold conditions down to cryogenic (-196°C) temperatures.
            • REMP® Microtube Technology
              2D Code
              REMP Microtube Technology
              • REMP Single Use Heat Sealed Microtubes
              • REMP Capped Microtube System
              • REMP Storage Microplates

               

              • 96 Way Microtubes
              • 384 Way Microtubes
              • Caps
              • Heat Seals
              • Lids and Piercing Lids
            • Matrical Microplates, Microtube Racks, Microplate Lids & Flask
              Microplates Clear Glass Bottom 125w
              Matrical Microplates, Microtube Racks, Microplate Lids & Flask
              • Glass Bottom Optical Imaging Microplates
              • Fluorescence & Luminescence Assay Microplates
              • Compound Storage Deepwell Microplates
              • Compound Storage Chemically Resistant Microplates
              • Storage Microtubes & Racks
              • Vial & Microtube Storage Racks
              • Universal Microplate Lids

               

        •  

           
          • Informatics
            • BioStudies
              BioStudies
              Brooks ISIDOR™ BioStudies – The biobank data management solution that works the way you do.
            • BiobankPro
              BiobankPro
              BiobankPro delivers a regulatory-compliant solution for sample lifecycle management, with all the features of FreezerPro with the addition of configurable workflows, enhanced integration with external data sources and instruments, kit management, sample requests and integrated charting and dashboards.
            • FreezerPro
              FreezerPro
              FreezerPro® is Brooks Life Sciences intuitive, fast, reliable and secure solution which enables users to know precisely where a laboratory sample is located even before opening the freezer door.
            • TempAura™ Temperature Monitoring
              TempAura monitoring chip 125w
              TempAura™ Remote Temperature Monitoring
              TempAura is the first solution that brings easy to use, affordable sample temperature monitoring to small, highly distributed biosample and compound storage.
            • Sprint 6 HTS Scheduling Software
              Sprint 6 Scheduling Software for HTS Systems
              Sprint 6 HTS Scheduling Software
              Sprint 6 Scheduling Software for HTS Systems

              Sprint 6™ dynamic scheduling software allows your organization to standardize on a single scheduler — regardless of your hardware supplier. With Sprint 6, you can extend the useful life of your high throughput screening (HTS) systems, reduce training and maintenance costs and add value via new functionality.
          • Scientific Downloads
            Scientific Downloads
            Case studies, white papers, posters, technical notes and application briefs.
          • Video Channel
            Video Channel

            Brooks Life Science Systems product video channel.


    • Cryogenics
      Featured Product
      On-Board IS Cryopump
      On-Board® IS Cryopumps
       
        • Brooks CTI-Cryogenics
           
          • Cryopumps & Compressors
             
            • On-Board® IS Cryopump Systems
              On-Board IS 320 Cryopump
              On-Board® IS Cryopump Systems
              Intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.
            • On-Board® Cryopumps
              On-Board IS Cryopump
              On-Board® Cryopumps
              On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
            • Cryo-Torr® Cryopumps
              CryoTorr 8 Cryopump
              Cryo-Torr® Cryopumps
              Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. For added flexibility, you can add your own customized controls and supporting peripherals to meet your specific application needs.
            • On-Board® Waterpumps
              On-Board Waterpumps
              On-Board® Waterpumps
              On-Board Waterpumps are high-performance vacuum pumps that increase water vapor pumping speeds to substantially improve system throughput and provide better process results.
            • Compressors
              Cryo Compressor
              Compressors
              Brooks CTI-Cryogenics offers a choice of compressors designed to provide optimum performance with On-Board Cryopumps, Cryo-Torr Cryopumps and/or On-Board Waterpumps. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications for all Brooks vacuum pumps.
        • Brooks Polycold
           
          • Cryochillers & Cryocoolers
             
            • P-102 Cryochiller
              P-102 Cryochiller
              P-102 Cryochiller
              Provides a compact, easy-to-use alternative to liquid nitrogen in small vacuum systems. These cryogenerators effectively eliminate the cost, inconvenience, and hazards associated with using liquid nitrogen — while delivering comparable performance.
            • PCC Compact Coolers
              Polycold PCC Component Cooler
              PCC Compact Coolers
              The PCC Compact Cooler is a compact, high-performance cooling system that brings new levels of efficiency and reliability to demanding applications such as high-resolution digital imaging, analytical chemistry, life sciences, materials analysis, semiconductor inspection, scientific research and water vapor cryotrapping.
            • PGC Gas Chillers
              PGC Polycold
              PGC Gas Chillers
              PGC Gas Chillers cool compressed dry gases, such as nitrogen, argon or air, from ambient to cryogenic temperature without pre-cooling. PGC Gas Chillers are closed-loop refrigeration systems that cool a non-recirculating gas stream using a refrigerant to gas tube-in-tube heat exchanger.
            • MaxCool Cryochillers
              XC Cryochiller
              MaxCool Cryochillers
              Polycold MaxCool Cryochillers are closed loop cryogenic refrigeration systems that provide up to 2,500 watts or 4,000 watts of cooling, respectively. These cryochillers can be used to capture water vapor and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. MaxCool cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing.
            • PFC Water Vapor Cryochiller
              PFC Polycold
              PFC Water Vapor Cryochiller
              The Brooks Polycold® PFC Water Vapor Cryochiller effectively captures water vapor, which typically comprises 65% to 95% of the gas load in high vacuum systems. It pumps vapor within minutes of “start,” defrosts in less than four minutes, and lowers water vapor partial pressure during processing for higher quality, better adhesion, and more reproducible deposition.
            • Cryodyne Refrigerators
              Cryodyne Refrigerator
              Cryodyne Refrigerators
              Cryodyne Refrigeration Systems are a family of two-stage, closed-cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle. They offer usable heat lift from <10K to >80K, making them highly suitable for a variety of commercial and research applications.
            • Refrigerant Replacement Charges
              Refrigerant Replacement Charges
              Lookup the refrigerant replacement charge part number for your model number to place an order.
        •  
           

  • Applications By Industry
    • Semiconductor Tool Automation
        • Display Manufacturing
           
        • LED
           
        • Wafer Level Packaging
           
        • RFID & IR Asset Tracking
           

    • General Vacuum & Cryogenics
        • Technical Library
           
          Brooks Cryogenics technical document library of application notes, technical papers and publications.

    • Life Science
        • Small Molecule Drug Discovery
           
          • Compound Management
             
        • Biological Sample Management
           
          • ULT Storage
             
          • Onsite & Offiste Sample Storage
             
          • Cryogenic Biobanking
             
          • Cell Therapies
             
        • High Throughput Screening
           
        • Scientific Downloads
          Case studies, white papers, posters, technical notes and application briefs.
        • Video Channel

          Brooks Life Science Systems product video channel.


  • Services
    • Semiconductor
        • Contact Customer Care
          Customer Care Phone Numbers & Hours
        • Equipment Refurbishment
           
          • Robots
          • Cryopumps & Compressors
          • Cryochillers & CryoTiger
          • Valves, Controllers & Modules
        • Certified Used Equipment
          Certified Used Equipment
          Certified Used Automation and Vacuum Products
        • Repairs & Exchanges
          • Cryopump Repair
             
            • Cryo-Torr® Cryopumps
              CryoTorr 8 Cryopump
              Cryo-Torr® Cryopumps
              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • On-Board® Cryopumps
              On-Board IS Cryopump
              On-Board® Cryopumps
              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • On-Board® IS Cryopumps
              On-Board IS 320 Cryopump
              On-Board® IS Cryopumps
              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
            • Compressors
              Cryo Compressor
              Compressors
              • One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
              • One year comprehensive warranty on all repair levels
          • Atmospheric Robots
             
            • AcuLigner
              Aculigner Robot
              AcuLigner
              The AcuLigner™ atmospheric robot is an integral part of the Brooks Automation high performance atmospheric wafer handling solutions. Utilizing direct drive technology and on-board controls, these systems play a key role in your performance and productivity. Extensive downtime due to repair is not an option. That’s why Brooks has created a Fixed Price Repair program to support the AcuLigner product.
            • AcuTran AquaTran
              AquaTran Robot Repair
              AcuTran AquaTran
              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the AcuTran/AquaTran 7 family of robots.
            • MultiTran 5 VacuTran 5
              MultiTran VacuTran Robot Repair
              MultiTran 5 / VacuTran 5
              The MTR 5 M model MultiTran® 5 robot with the Brooks patented BiSymmetrik™ arm and dual SEMI/MESC compatible end effectors is a vacuum wafer handling robot which enables high throughput handling in isolated cluster tools.

              The VTR 5 M model VacuTran™ 5 robot is a high reliability wafer-handling robot with a SEMI/MESC compatible arm and end effectors. The VTR 5 M is a top mounting robot with a single arm configuration for application in large transport chamber modules such as those in cluster tools.
            • Razor
              Razor Atmospheric Robot
              Reliance ATR 8
              Razor’s modular design allows customers to customize their field-replaceable unit (FRU) package to align with their mean-time-to-repair (MTTR) strategy and keep unscheduled downtime to a minimum. Brooks offers a Fixed Price Repair program to support the Razor robot.
            • Reliance ATR 8
              Reliance Robot Repair
              Reliance ATR 8
              With the Reliance ATR, lengthy repair cycle times can lead to increased costs and unscheduled downtime. For this reason Brooks has developed a Fixed Price Repair program to support the Reliance ATR.
          • Equipe / PRI Robots
             
            • AxM 100/200/400
              Equipe PRI AxM Robot
              AxM 100/200/400
              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
            • DBM 2400/2700
              Equip PRI DBM Robot Repair
              DBM 2400/2700
              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
            • PRE-200™ PreAligner
              Equipe PRI PreAligner
              PRE-200™ PreAligner
              • One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
              • Original Equipment Manufacturer: product technical experts and design engineers
              • Repairs available in all regions that have major semiconductor fabs
          • Vacuum Robots
             
            • MagnaTran 7
              MagnaTran 7 Vacuum Robot
              MagnaTran 7
              The MagnaTran® 7 (MAG 7) robot is the most advanced and reliable robot for operation in vacuum and isolation environments such as cluster tools. Reliability is proven at > 11.5 MCBF. With the MagnaTran 7 lengthy repair cycle times can lead to increased costs and unscheduled downtime. This is why Brooks created a Fixed Price Repair program to support the MagnaTran 7 robot.
            • MagnaTran 8
              MagnaTran 8 Robot Repair
              MagnaTran 8
              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the MagnaTran 8 family of vacuum robots.
            • VAC 407
              VAC 407 Robot
              VAC 407
              Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the VAC-407 vacuum robot.
          • Robot Controllers
            Robot Controllers
            Robot Controllers
            Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the robot controllers, to work with the AXM, DBM, AquaTran™/AcuTran® and Reliance™ ATR™ robot families.
        •  
        • Other Repairs & Exchanges

          Fixed Price Repair program for atmospheric and vacuum robots, vacuum gauges, controllers, monitors and cryopumps.

          • Copper Segregation
            Prevent the contamination of non-copper processes and the equipment used in those processes.
          • Global Repair Locations
            Repair locations in the United States, Europe and Asia.
        • Field Services
           
          • Onsite Support
          • Service Agreements
          • Fab Productivity Services
        • Upgrade Services
           
          • CTI-Cryogenics
             
            • Cryo Implanters Upgrades
            • Cryo PVD Upgrades
        • Spare Parts

    • Life Science
        •  
           
          • Sample Lifecycle Management
            Sample Lifecycle Management
            Sample Lifecycle Management
            BioStorage Technologies, a subsidiary of Brooks, provides comprehensive sample lifecycle management solutions.

  • Education
      • Product Education & Training
        • Semiconductor Automation Training
        • Training Policy
        • Request Training Quote
      • Life Science Solutions Training
  • Support
    • Semiconductor Automation & Cryogenics
        • Technical Support
          • Worldwide Phone Numbers
        •  
        • Documentation & Software
          • Cryopumps & Compressors
            • Polycold & CTI-Cryogenics Cryopumps
            • Compressors
          • Cryochillers & Cryocoolers
            • CTI-Cryogenics & Polycold Manuals
            • Material Safety Data Sheets
            • Refrigerant Replacement Charges

    • Life Science
        •  
          • Support
            • Phone Numbers
            • Service Agreements
            • Spare Parts
            • Training

  • Company
    • About Brooks
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
        • About Brooks
           
          •  
             
            • Management Team
            • Board of Directors
            • Corporate Governance
            • Corporate Responsibility
            • Quality Assurance
            • Sustainability
            • Terms & Conditions
            • Corporate Logo

    • Contact Us & Global Offices
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
        • Contact Us & Global Offices
          • Global Offices
            • Asia
            • Europe
            • North America
          • Product Reps for Instrumentation
          • Contact & Info Request
          • Website Feedback

    • News & Events
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
        • News, Events & Webinars
          •  
            • News & Press Releases
            • Events

    • Investors
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
        • Investors
          •  
            • Stock Information
            • Press Releases
            • Events Webcasts
            • Corporate Governance
            • Investor Presentations
            • Quarterly Annual Reports
        •  
          •  
            • SEC Filings
            • Fundamentals
            • Analyst Coverage
            • Email Alerts
            • Contact Investor Relations
            • Request Printed Materials

    • Careers
      Brooks Automation, Inc.
      Brooks Automation HQ Chelmsford MA USA
       
        • Careers
           
           

  • My Brooks
      • Shipping

        Warranty Shipping Policy for New Products, Repairs and Spares.

        • Shipment Tracking
          Track your shipment.
      • Suppliers

        Tools and information for Brooks Suppliers.

        • Purchase Terms & Conditions
          Purchase Terms and Conditions in English, German and Japanese.
        • Supply Chain Policy
          Supply Chain Social and Environmental Responsibility Policy
        • Documents

          Procedures, Forms & Templates, FAQ

        • Supplier Initiated Action Request

          Supplier Initiated Action Request (SIAR) web form.

        • Supplier Portal
          Strategic supply chain information and resources portal.
  • Contact Us
    • Brooks Automation

    • Brooks Life Science Systems