Reticle Cassette Carrier

(CA-2004)

CA-2004 PET Reticle Cassette Carrier 430w

The CA-Series reticle cassettes are designed to allow handling of reticles in a wafer cassette form factor compatible with pods and general cassette platforms. The CA-2004 is one such cassette which accommodates 152mm reticles in a 200mm cassette form factor. This allows reticle handling to be done with standard semiconductor automation components including 200mm SMIF robots. It is compatible with all 200mm SMIF pods as well as open cassette platforms.

The Brooks MicroTool product line increases yield and equipment uptime by improving critical handling operations. Products include robot alignment systems, load port alignment tools, electronic levels, carbon fiber and glass dummy wafers, cassette inspection tools, and bridge adapters to allow equipment to handle multiple wafer sizes. Services include tool and fab-wide calibration services applying these enabling tools and our automation expertise.

Features

  • Carrier for 152mm (6”) reticles.
  • Fits in 200 mm SMIF Pods.
  • Compatible with 200mm cassette platforms.
  • Industry standard H-bar design.
  • Handle for manual or automated handling.

Benefits

  • Handle reticles with standard 200mm automation.
  • Store reticles in SMIF Pod to prevent contamination.
  • Transport reticles in SMIF Pod using automated handling.
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Specifications

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DESIGN
  • Cleanroom compatible materials
  • Holds 152 mm (6”) reticles
  • Compatible with 200 mm SMIF Pods
  • Compatible with 200 mm cassette platforms
  • Custom configurations available upon request
OTHER
  • Part size: 200mm x 200mm x 200mm (8" x 8" x 8")
  • Part weight: 1 kg (2 lbs)
  • Material: High purity polymers and anodized aluminum