300mm Metal Cassette


CA-3000 300mm Metal Cassettes 430w

The CA-3000 is a 300mm metal cassette designed to support manual and automated handling and withstand high temperature applications. The exceedingly open design facilitates convective flow in thermal applications, yet the form factor is designed in accordance with SEMI FOUP specifications. This allows the cassette to support the full array of manual and automated handling without requiring changes to equipment settings. The automated wafer retainer, another unique feature of the CA-3000, offers additional convenience and security.

The Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300 mm to 200 mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration services.


  • High temperature capability up to 900°F
  • Open design improves convective flow
  • Ergonomic handles for manual handling
  • Robotic rails and optional robotic top for PGV, AGV, and AMHS compatibility
  • Supports clamping, info pads, and other FOUP design features
  • 44mm slot 1 height and 10mm pitch replicates FOUP wafer positions to further simplify automated handling
  • Unique automated wafer retainer improves convenience and security


  • High temperature applications without sacrificing manual and automated handling
  • Design around FOUP specifications simplifies equipment interface


  • Cleanroom compatible materials
  • High temperature capable up to 900°F
  • Holds 25 300mm wafers
  • 44mm slot 1 height and 10mm slot pitch
  • Compatible with 300 mm FOUP specifications
  • Automated or manual handling
  • Automated wafer retainer
  • Part size: 305mm x 330mm x 355mm (12" x 13" x 14")
  • Part weight: 5 kg (11 lbs)
  • Material: Anodized Aluminum