200mm Wafer Adapter for 300mm FOUPs

(AM-3005 Rev B)

AM-3005 200mm Wafer Adapter for 300mm FOUPs 430w

It’s a fact; handling 300mm wafers is expensive! The Brooks AM-3005 wafer adapter allows 200mm wafers to be processed inside a 300mm FOUP — saving you time and money! Simply slide the unit in and start reducing your wafer costs. Remove the adapter at any time to return to 300mm capability.

The Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration services.

Features

  • Constructed from anodized aluminum and high-temperature thermoplastics.
  • Retention features secure the adapter firmly, yet allow for easy removal. 
  • Compatible with FOUPs from all manufacturers.
  • Allows 200mm wafers to be processed within a 300mm FOUP.
  • 25 200mm wafer capacity
  • Able to adjust wafers to forward or center position.
  • Maintains 300mm wafer plane.

Benefits

  • Save time.
  • Easily switch from 200mm to 300mm.
  • Save money using 200mm reference wafers.
  • Enjoy latest generation 300mm tools and still process 200mm wafers.
  • Test process changes on lower cost 200mm wafers.
spacer10

Specifications

spacer10
DESIGN
  • Adjustable for wafer-forward or wafer-center placement
  • Retention features firmly secure the adapter — yet allow easy removal
  • Manufactured from anodized aluminum and high-temperature thermoplastics
  • Maintains 300mm wafer plane
  • Wafer contact only with thermoplastic risers
COMPATIBILITY
  • Compatible with FOUPs from all manufacturers
  • Consistent with SEMI-standard 6mm lift clearance and 10mm pitch
OTHER
  • Size: 300mm x 300mm x 250mm (12" x 12" x 10")
  • Weight: 2 kg (4 lb)