300mm to 200mm Cassette Adapter in 300mm FOUP

AM-3004 3 300mm-200mm Cassette Adapter in 300mm FOUP 430w

Handling 300mm wafers is expensive! The Brooks cassette adapter allows a cassette with 200mm wafers to be handled inside a 300mm FOUP. Simply slide the unit in and start reducing your wafer costs. Remove the adapter at any time to return to 300mm capability.

  • AM-3004-3 - Places wafers in center position within FOUP or 50mm forward position
  • AM-3004-2 - Places wafers in center position within FOUP or 25mm forward position

The Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration services.

Features

  • Allows 200mm wafers to be handled inside a 300mm FOUP.
  • Has a slider mechanism to capture the H-bar.
  • Retention feature secures the adapter firmly, yet allows for easy removal.
  • Manufactured from anodized aluminum with polycarbonate retention springs.
  • Registers the cassette H-bar.
  • Compatible with most cassettes and FOUPs.
  • Can place wafers in center position within the FOUP or 50mm forward.
  • Works on most load ports.
  • Easily handle 200mm wafers on 300mm equipment.

Benefits

  • Saves time.
  • Easily switch from 200mm to 300mm.
  • Save money using 200mm reference wafers.
  • Enjoy latest generation 300mm tools and still process 200mm wafers.
  • Test process changes on lower cost 200mm wafers. 
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Specifications

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DESIGN
  • Incorporates Brooks-PRI’s standard 200mm cassette platform
  • Tested compatible with most popular cassettes and FOUPs
  • Retention features firmly secure the adapter — yet allow easy removal
  • Slider captures cassette H-bar
  • Places wafers in center position within FOUP or 50mm (AM-3004-3) or 25mm (AM-3004-2) forward position 
OTHER
  • Materials: Anodized aluminum with polycarbonate retention springs
  • Dimensions: 300mm x 300mm x 250mm (12" x 12” x 10")
  • Weight (without cassette): 1.45 kg (3.2 lb)