Universal Wafer Adapter for 300mm Load Ports

(AM-3010)

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AM-3010 1 300mm Universal Adapter for 300mm Load Ports 200w    AM-3010 2 300mm Universal Adapter 200w

Handling multiple sizes of wafers is difficult and expensive!  The Brooks AM-3010 wafer adapter allows 300mm, 200mm, 150mm, and 100mm cassettes to be processed inside a 300mm FOUP style microenvironment, all with standard 300mm equipment.  Using the same system for all wafer sizes expands the capability of 300mm equipment and saves time and money. Simply place the unit on your load port to handle the various wafer sizes and cassettes. 300mm can also be handled inside the adapter in an open cassette, or  remove the adapter at any time to return to 300mm FOUPs. If you are using a Brooks Jet EFEM or Vision load port, the system will also automatically detect wafer size for seamless handling.

The Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for conversion between 450mm, 300mm, 200mm, 150mm and 100mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration services.

Features

  • Constructed from anodized aluminum and high purity thermoplastics.
  • Kinematic interface features seat the adapter firmly, yet allow for easy removal. 
  • Compatible with most load ports.
  • Allows 300mm, 200mm, 150mm, and 100mm cassettes to be processed within a 300mm FOUP style container.
  • References on primary or secondary kinematic pins.
  • Optical / mechanical in place sensor pads.
  • Maintains SEMI standard wafer planes. 
  • Compatible with static and dynamic retention methods. 

Benefits

  • Easily switch from 300mm to 200mm, 100mm and 125mm.
  • Save money using multiple size cassettes on a single load port.
  • Develop 200mm, 150mm and 100mm tools and processes using available 300mm resources.
  • Enjoy latest generation 300mm tools and still process 200mm, 150mm and 100mm wafers.
  • Test process changes on lower cost wafers. 
  • Accelerate the development and implementation timeline.
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Specifications

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DESIGN
  • Constructed from anodized aluminum and high-temperature high purity thermoplastics.
  • Kinematic interface features seat the adapter firmly, yet allow for easy removal.
  • Allows 200mm, 150mm, and 100mm cassettes to be processed within a 300mm FOUP style container.
  • Maintains SEMI standard wafer planes
  • Wafer contact only with your cassette
COMPATIBILITY
  • Compatible with most load ports.
  • Compatible with static and dynamic retention methods. 
OTHER
  • Size: 300mm x 300mm x 250mm (12" x 12" x 10")
  • Weight: 6.4 kg (14 lb)