100mm-300mm Glass Target Wafers


TW-series Glass Target Wafer 430w

Tired of paying for the downtime it takes to align your wafer handling equipment only to discover defects caused by misalignment? Looking for a simple way to improve the accuracy and reduce the time it takes to align equipment? Brooks target wafers are the answer!

Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration services.


  • Available in 125, 150, 200, 300 and 450 mm sizes.
  • Manufactured from clear, precision ground glass.
  • Precision markings placed on the wafer at every 2.5mm.
  • Opaque perimeter allows the edge to be detected by wafer handling equipment.
  • “Virtual” notch allows for compatibility with tools that require a notch.


  • Saves time and improves accuracy by limiting misalignment.
  • Simple to use, minimizing operator errors.
  • Improve MTTR.
  • Increase MTBF.


  • Available in 100mm, 125mm, 150mm, 200mm, 300mm, and 450mm SEMI-compatible diameters
  • Crystal clear, precision ground Aluminosilicate quality glass
  • “Virtual” notch allows compatibility with equipment that requires the presence of a notch
  • Each target wafer ships in a sturdy and convenient storage box
  • Patent pending
Part Number Diameter Thickness
TW-100 100.00 +/- 0.15mm 750 +/- 75µm
TW-125 125.00 +/- 0.15mm 750 +/- 75µm
TW-150 150.00 +/- 0.15mm 750 +/- 75µm
TW-200 200.00 +/- 0.15mm 750 +/- 75µm
TW-300 300.00 +/- 0.15mm 1100 +/- 100µm
TW-400 400.00 +/- 0.15mm 1100 +/- 100µm

  • Part size (with case): Wafer diameter + 25mm
  • Part weight: 0.25 kg (.5 lb)