Carbon Fiber Dummy Wafers (CF-Series)

CF-series Carbon Wafer Dummies

Set up and cycle test your equipment without breaking silicon wafers. This high-tech carbon fiber composite wafer is virtually indestructible and is manufactured to SEMI-standard diameter, flatness and notch specifications.  Carbon fiber dummy wafers are also designed to mimic the weight and structural characteristics of silicon wafers.  

Custom Configurations

Do you have a special application?  We can design the wafer to meet your custom specifications! Some of the possible options are:

  • custom artwork
  • holes
  • oversized and undersized wafer diameter
CF-series 1

The Brooks MicroTool product line increases yield and equipment uptime by improving critical handling operations. Products include robot alignment systems, load port alignment tools, electronic levels, carbon fiber and glass dummy wafers, cassette inspection tools, and bridge adapters to allow equipment to handle multiple wafer sizes.  Services include tool and fab-wide calibration services applying these enabling tools and our automation expertise.


  • Available in 125,150, 200, 300 and 450mm SEMI-compatible diameters.
  • Customization of printed patterns and machined geometries is also available.
  • Carbon Fiber material approximates the weight of a silicon wafer.
  • Wafer perimeter and notch compatible with pre-aligners.
  • Carbon Fiber Material is virtually indestructible.
  • Compatible with vacuum and edge-grip end-effectors.


  • Lasts longer than silicon or other dummy wafers.
  • Burn-in and set up equipment without the risk of breaking silicon.
  • Save time and money.


  • Available in 125mm through 450mm SEMI-compatible diameters
  • Part weight and stiffness approximates that of silicon wafers
  • High-tech carbon fiber composite material maintains flatness
  • Vacuum end-effector compatible
  • SEMI-standard notch allows the edge to be sensed in prealigners and orienters
  • Material is virtually indestructible
  • Lower cost than 300mm silicon wafers
  • Patent pending
Part Number Diameter Thickness
CF-125 125.00 +/- 0.15mm 1.2mm
CF-150 150.00 +/- 0.15mm 1.2mm
CF-200 200.00 +/- 0.15mm 1.2mm
CF-300 300.00 +/- 0.15mm 1.2mm
CF-450 450.00 +/- 0.15mm 1.2mm

  • Shipping weight: 0.5 kg (1 lb)