Load Port Force Gauge (FG-3000)

FG-3000 Load Port Force Gauge

It’s a fact: 300mm automation is complicated and interoperability issues are expensive! Brooks Automation offers a number of inspection and setup tools to identify and address issues and optimize 300mm automation. The FG-3000 load port force gage allows you to measure load port docking force and door closure force to insure load port and FOUP interoperability. This is particularly critical with older load ports designed under less demanding SEMI load port force requirements. Simply place the unit on the kinematic pins, dock and/or close, and take your reading to insure compliance with current manufacturer recommendations.

Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration services.

Features

  • Quickly and easily measure load port door closure force and docking force.
  • Compatible with load ports from all manufacturers.
  • Large, easy-to-read, backlit integrated display.
  • USB output to PC software.
  • Rechargeable battery powered.
  • Manufactured from anodized aluminum and high purity low friction plastic.
  • References on primary or secondary kinematic pins.
  • Can return to operation by simply removing the force gauge.

Benefits

  • Insure load port and FOUP interoperability.
  • Easily measure load port force.
  • Save money by properly setting up your load port.
  • Intuitive operation – minimal training necessary.
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Specifications

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DESIGN
  • Manufactured from anodized aluminum.
COMPATIBILITY
  • Compatible with loadports from all manufacturers
  • Compatible with all SEMI standard kinematic pin configurations
OTHER
  • Part size: 250mm x 250mm x 101mm (10" x 10” x 4")
  • Part weight: 1 kg (2 lb)