Next Generation Electronic Spot Level

(EL-5003)

EL-5003 Electronic Spot Level 430w

Soon to be the most used item in your toolkit. Keep all of your equipment “on-the-level” with Brooks the electronic spot level. Designed as a versatile electronic level, this “spot” level can easily check level at 0 degrees, 90 degrees, and 180 degrees. A mounting-hole pattern can be used to attach the EL-5003 to your reference surface or substrate. The simple-to-use display allows you to level to earth or to your own user-defined reference plane.  Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments.

Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations.  Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools.  Services include tool and fab-wide calibration services. 

Features

  • New high resolution, high accuracy electronic level.
  • Remote adjustments can be made conveniently using the remote real-time display. 
  • Precision-machined aluminum housing provides level reference on four surfaces. 
  • Fast settling time
  • Improved software with user setup capabilities.
  • 2-Axis electronic level for leveling to ground or to a learned reference.
  • Numerical readout for both pitch and roll allows for statistical analysis and calibration to specification.
  • Intuitive graphics screens and touch screen LCD simplify the operation.

Benefits

  • Save time aligning equipment. 
  • Increase yield and throughput.
  • Solve root-cause handling issues.
  • Eliminate wafer scratches.
  • Increase MTBF.
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Specifications

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DESIGN
  • Can be attached to a variety of substrates using threaded holes
  • Four reference surfaces allow the unit to be used in almost any orientation
  • Highly sensitive electronic level 
  • Numerical readout of pitch and roll
  • Remote display can be seen from point of adjustment
  • User can define a reference plane
  • Lightweight machined anodized aluminum
  • M3 screw mounting hole pattern enables user to mount the EL-5003 to your reference surface or substrate
OTHER
  • Accuracy: ± 0.02 degrees near zero
  • Repeatability: ± 0.02 degrees 
  • Resolution: 0.001 degrees
  • Total range: ± 8 degrees
  • Size: 3” x 3” x 0.75” 
  • Shipping weight: 3 kg (6 lb)