Next Generation Electronic Reticle Level


EL-5003 Electronic Reticle Level 430w

Soon to be the most used item in your toolkit. Keep all of your equipment “on-the-level” with the Brooks electronic reticle level. Designed to match a 150 mm reticle, this “reticle” level can easily measure robots and reticle positions for level or co-planarity. The simple-to-use display allows you to level to earth or to your own user-defined reference plane.  Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments. 

Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations.  Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools.  Services include tool and fab-wide calibration services. 


  • New high resolution, high accuracy electronic level.
  • Remote adjustments can be made conveniently using the remote real-time display. 
  • Precision-machined aluminum housing provides level reference on top or bottom surfaces. 
  • Fast settling time
  • Improved software with user setup capabilities.
  • 2-Axis electronic level for leveling to ground or to a learned reference.
  • Numerical readout for both pitch and roll allows for statistical analysis and calibration to specification.
  • Intuitive graphics screens and touch screen LCD simplify operation.


  • Save time aligning equipment. 
  • Increase yield and throughput.
  • Solve root-cause handling issues.
  • Eliminate wafer scratches.
  • Increase MTBF.


  • Matches a 150mm reticle substrate
  • Highly sensitive electronic level 
  • Numerical readout of pitch and roll
  • Remote display can be seen from point of adjustment
  • User can define a reference plane
  • Lightweight machined anodized aluminum approximates the weight of a reticle
  • Accuracy: ± 0.02 degrees near zero
  • Repeatability: ± 0.02 degrees 
  • Resolution: 0.001 degrees
  • Total range: ± 8 degrees
  • Size: 6” x 6” 
  • Shipping weight: 3 kg (6 lb)