Electronic Kinematic Pin Level

(EL-5003-KP)

EL-5003-KP Electronic Kinematic Pin Level 430w

Keep your equipment “on-the-level” with Brooks kinematic pin electronic level. Designed to rest on SEMI standard kinematic pins, this specialized level can accurately measure your load port’s level or co-planarity (or that of many other interfaces).  A remote touch-screen display with real-time graphic and numeric data provides simplicity, accuracy, and flexibility. The intuitive interface allows you to level to earth or to your own user-defined reference plane, easily making two interfaces co-planar without leveling to earth. Equipment adjustments are completed quickly and accurately with the help of the remote real-time display. While the unique design offers unprecedented accuracy in leveling kinematic pins, the bottom surface can also be used in a variety of other leveling applications.

Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools.  Services include tool and fab-wide calibration services. 

Features

  • High resolution, high accuracy electronic level.
  • 2-Axis electronic level for leveling to ground or to a learned reference.
  • Remote adjustments can be made conveniently using the remote real-time display.
  • Fast settling time provides real-time response.
  • Precision-machined kinematic plate is uniquely capable of accurately aligning kinematic pins.
  • Numerical readout for both pitch and roll allows for statistical analysis and calibration to specification.
  • Intuitive graphics screens and touch screen LCD simplify operation.
  • Flexible software with user setup capabilities such relative reference planes, tolerance warnings, and data logging.

Benefits

  • Save time aligning equipment.
  • Increase yield and throughput through accurate alignment.
  • Solve root-cause handling issues.
  • Eliminate wafer scratches.
  • Increase MTBF.
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Specifications

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DESIGN
  • Kinematic plate design provides precise SEMI standard kinematic pin interface.
  • Highly sensitive 2-axis electronic level.
  • Numerical readout of pitch and roll.
  • Remote display can be seen from point of adjustment.
  • User can define any reference plane.
  • Solid machined aluminum construction with anodized and nickel plated finish ensures precision and clean-room compatibility.
OTHER
  • Accuracy: ± 0.02 degrees near zero
  • Repeatability: ± 0.02 degrees 
  • Resolution:  0.001 degrees
  • Total range: ± 8 degrees
  • Size: 12” x 12” 
  • Shipping weight: 3 kg (6 lb)