200mm Cassette Checker (MC-2000)

MC-2000 200mm Cassette Checker 430w

The Brooks Assure Series Cassette Checkers save you time and money by providing a fast and simple method for checking cassettes. Designed with daily fab use in mind, the MC-2000 offers a quick answer to the question, “Is it the tool or the cassette?” Quit throwing good cassettes away. Quit finding bad cassettes by wasting good production wafers. Start checking your cassettes the sensible way — with the MC-2000 200mm Cassette Checker!

The Brooks Alignment Services Division increases silicon yield and equipment uptime by improving critical wafer handling operations. Products include robotic alignment systems, bridge adapters for 300mm to 200mm, load port alignment systems, electronic levels, carbon fiber and glass dummy wafers, and cassette inspection tools. Services include tool and fab-wide calibration services. 


  • Easy red/green indication
  • Instant measurement
  • Simple to use
  • Accurate repeatable measurements


  • Save prime wafers
  • Eliminate problem cassettes
  • Eliminate wafer scratches
  • Save equipment maintenance time chasing cassette problems


  • H-bar bow (D3a)
  • Flatness of H-bar plane (Datum A)
  • Bottom inside width (D6a)
  • Bottom outside width (D6g)
  • Flatness of cassette track (Datum B)
  • Each microswitch is adjustable in increments of 28µm (0.0011") and is repeatable to within 10µm (0.0004")
  • Can be configured for virtually any 200mm cassette
  • Each MC-2000 is factory calibrated to NIST traceable standards and includes a Certificate of Calibration. Re-calibration can be performed at the factory or customer's site
  • Easily adjusted in the field, the MC-2000 can be set to SEMI standards, a cassette manufacturer specification, or your “Fab Functional” specification
  • Power required: 6 volts DC, 500 mA (AC adapter included)
  • Part size: 560 mm x 300 mm x 50 mm (22" x 12" x 2")
  • Part weight: 13 kg (28 lbs)