On-Board® IS Cryopump Systems

The Brooks CTI-Cryogenics intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.

On-Board IS cryopumps deliver highest uptime, best productivity, and lowest overall cost of ownership of any cryopump systems available today, backed by the Brooks highly responsive global service and support network.

Data Sheets

   

Key Features

  • Patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance, delivering exceptional process consistency
  • Quickest regenerations in single and multi-pump configurations
  • Low consumption of energy and cooling water with no compromise in vacuum performance
  • Easy system integration
  • Fast production installation
  • Enhanced remote monitoring for both preventive and predictive maintenance