On-Board® Cryopumps

The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.

Key Features

  • Fast Regen™ capability that extends cryopump performance between regenerations
  • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
  • An  embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
  • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation

On-Board Cryopump Model

4F

8

8F

10

10F

250F

400

500

Pumping Speeds - liters/sec.

 

Water Vapor

1,100

4,000

4,000

9,000

9,500

6,500

17,500

30,000

Air

370

1,500

1,500

3,000

 

2,200

6,000

10,000

Hydrogen

370

2,500

2,200

5,000

 

3,200

12,000

12,000

Argon

310

1,200

1,200

2,500

 

1,800

5,000

8,400

Capacity - std. liter

 

Argon

210

1,000

1,000

2,000

 

1,000

2,500

6,000

Hydrogen (5x10-6 Torr)

3

17

12

24

24

16

42

45

Nominal Regeneration Time (cold to cold)

 

First & Second Stage

75 min.

2.5 hrs

2.5 hrs

2.5 hrs

2.5 hrs

<3.3 hrs

3 hrs

<3.8 hrs

Second Stage

<1 hr

<1 hr

<1 hr

<1 hr

<1 hr

<1.5 hrs

<1.5 hrs