Products

Cryopumps, Cryochillers & Compressors

CTI-Cryogenics and Polycold Products

	Cryopumps On-Board® IS Cryopump Systems On-Board® Cryopumps Cryo-Torr® Cryopumps On-Board® Waterpumps PFC Water Vapor Cryopump
	Cryochillers & Compressors P-102 Cryochiller PCC Compact Coolers PGC Gas Chillers PGCL Closed Loop Gas Chillers	XC Cryochiller Cryodyne Refrigerators Compressors

Products
- Semiconductor Automation
  
  Featured Product
  
  Spartan™ 300mm
  4 I/O Sorter
  
  Factory Automation Solutions
  
  Spartan Sorters
  
  Spartan Sorters
  
  This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.
  
  DARTS FOUP Buffer
  
  DARTS FOUP Buffer
  
  Represents a new generation of flexible, near-tool buffering devices. Utilizes the space under the ceiling and can be mounted in a cleanroom aisle or on top of a process tool.
  
  Load Ports
  
  Certon™ 450 Load Port
  
  Certon™ 450 Load Port
  
  The Certon™ 450mm Load Port is compliant to 450mm FOUP, FOSB, and MAC (Multi Application Carrier) standards.
  
  Vision™ 300 Load Port
  
  Vision 300 Load Port
  
  The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration.
  
  IsoPort™ 300 Load Port
  
  IsoPort 300 Load Port
  
  Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to 300mm wafers.
  
  Reticle Automation
  
  ZARIS Reticle Automation System
  
  ZARIS Reticle Automation System
  
  Reliably automates the handling of 5” and 6” reticles from a wide range of shipping and stepper cassettes.
  
  Narrow Reticle Indexer
  
  Narrow Reticle Indexer
  
  Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.
  
  Guardian Bare Reticle Stocker
  
  Guardian Bare Reticle Stocker
  
  Fully automated, high-density storage system for 5" and 6" reticles. The Guardian completely isolates reticles from the surrounding environment featuring a unique design with a reticle "vault".
  
  SMIF Solutions
  
  SMIF Load Port Transfer (LPT)
  
  SMIF Load Port Transfer (LPT)
  
  Ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200 mm and 150 mm wafer processing and metrology tools.
  
  SMIF-INX Indexers
  
  SMIF-INX Indexers
  
  Designed to supply wafer indexing for fixed Z-axis wafer handlers or cassette positioning to a fixed plan for Z-axis wafer handlers.
  
  VersaPort™ 2200 Load Port
  
  VersaPort 2200 Load Port
  
  The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.
  
  ERGOSPEED II™ Load Port
  
  ERGOSPEED II Load Port
  
  Highly reliable, ultra-clean 200mm SMIF load port solution for adaptive tool interface applications. Ensures maximum cleanliness within the cassette and wafer area to prevent contamination featuring the Brooks superior laminar airflow design.
  
  SLR 200 M Series
  
  SLR 200 M Series
  
  Allows manual loading and unloading of 8-inch standard SMIF pods containing a wafer or reticle cassette for fast, easy access.
  
  Wafer Handling Robotics
  
  Atmospheric Robots
  
  Razor™ Atmospheric Transfer Robot
  
  Razor™ Atmospheric Transfer Robot
  
  Razor robots provide the superior performance, reliability, and ultra-cleanliness required for today’s advanced semiconductor manufacturing operations. The Brooks kinematic mounting system, patented motion control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime.
  
  Yaskawa M112/M122 Robot
  
  Yaskawa M112/M122 Robot
  
  Footprint optimal solution for small Equipment Front End Modules (EFEMs), especially when edge grip handling is required. The YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.
  
  Yaskawa M201 Robot
  
  Yaskawa M201 Robot
  
  Highly efficient, fast swap solution, especially when combined with linear motor track options. YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.
  
  Razor™ Aligner
  
  Razor Aligner
  
  High-performance atmospheric Razor Aligner provides ultra-precise wafer positioning of 200mm, 300mm, or 450mm wafers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time.
  
  Vacuum Robots
  
  MagnaTran® 7 BiSymmetrik™
  
  MagnaTran® 7 BiSymmetrik™
  
  The MagnaTran® 7 BiSymmetrik™ (MAG 7 B) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failure (MCBF) of > 11 million.
  
  MagnaTran® 7 Frogleg™
  
  MagnaTran® 7 Frogleg™
  
  The MagnaTran® 7 Frogleg™ (MAG 7 F) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
  
  MagnaTran® 7 Leapfrog®
  
  MagnaTran® 7 Leapfrog®
  
  The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications.
  
  MagnaTran® 7 SCARA
  
  MagnaTran® 7 SCARA
  
  The MagnaTran® 7 SCARA (MAG 7) robot incorporates all the technical advantages of the MagnaTran Product Family resulting in a demonstrated mean cycle between failures (MCBF) of > 11 million.
  
  MagnaTran® 8 QuadraFly
  
  MagnaTran® 8 QuadraFly
  
  The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter.
  
  MagnaTran® 8 Radius™
  
  MagnaTran® 8 Radius™
  
  The dual arm MagnaTran® 8 Radius™ robot extends the benefits of MagnaTran field-proven direct drive technology to a tri-axial drive. In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter.
  
  Components
  
  InLigner™
  
  InLigner
  
  The InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm SEMI-standard and Jeida-standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square.
  
  Fusion™ Controls
  
  Fusion Controls
  
  The industry’s most flexible and complete automation control solution. Fusion Controls deliver maximum performance and uptime. They are fully customizable and remarkably easy to use, while accelerating time to market and tool profitability.
  
  Wafer Handling Systems
  
  Vacuum Systems
  
  VCE Load Locks
  
  Vacuum Cassette Elevator (VCE) Load Locks
  
  Available in four styles to suit your wafer fabrication environment, the VCE 6 Vacuum Cassette Elevator load lock provides cost-effective, state-of-the-art factory interfacing to enable safe, clean AGV, RGV, or human operator transfer of up to 200mm SEMI standard wafer cassettes.
  
  Marathon™ 2 Transport System
  
  Marathon 2 Transport System
  
  Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments. We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements.
  
  Marathon™ Express
  
  Marathon Express Vacuum Transport System
  
  The Marathon Express® is a modular, configurable Vacuum Transport System (VTS) optimized for superior vacuum performance and high throughput for 100mm, 125mm, 150mm, and 200mm wafer size applications.
  
  Atmospheric Systems
  
  Jet™ Atmospheric Transport System
  
  Jet Atmospheric Transport System
  
  Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.
  
  Spartan™ Atmospheric Transport System EFEMs
  
  Spartan Atmospheric Transport System EFEMs
  
  Brooks offers equipment manufacturers and chipmakers truly high-performance atmospheric equipment front-end solutions with its Spartan™ EFEM. Spartan EFEM delivers higher throughput, higher particle performance, optimized cleanroom space and lower cost of ownership (COO) with its simple, unified design.
  
  Spartan™ 450mm Development Platform
  
  Spartan 450mm Development Platform
  
  A unique, small footprint, low-cost system that allows original equipment manufacturers (OEMs) to reliably get wafers into and out of process chambers. This single FOUP EFEM accelerates OEMs 450mm development efforts by eliminating the need to spend engineering time on platform development.
- Life Science Systems
  
  Featured Product
  
  BioStore™ Ultra Low Temperature
  
  Life Science Systems
  
  Compound Management & Sample Storage Systems
  
  -20°C Small to Medium Standard
  
  -20°C Small to Medium Standard Storage Systems
  
  With a focus on high storage densities, multi-format picking, modularity, flexibility and reliability, the Brooks automated sample storage and compound management range, comprising the Brooks SSS™, A3™ and Universal Labstore™ systems, is ideally suited for small to medium size sample collections.
  
  -20°C Automated Large Scale Compound Storage
  
  -20°C Automated Large Scale Compound Storage
  
  Whether used for compound storage in the pharmaceutical or agrichemical sectors, or biological a biobank, Brooks storage solutions have served as the sample logistics backbones of some of the world’s largest life science and bio-repository organizations for since 1997.
  
  BioStore™ -80° Automated Sample Storage Systems
  
  BioStore™ -80° Automated Sample Storage Systems
  
  Automated -80°C sample storage with guaranteed long term sample integrity achieved through stringent environmental controls, efficient sample processing and system redundancy. Optimized storage density, -80°C picking and flexibility for current and future collection changes.
  
  Sprint 6 HTS Software
  
  Sprint 6 Scheduling Software for HTS Systems
  
  Sprint 6™ dynamic scheduling software allows your organization to standardize on a single scheduler — regardless of your hardware supplier. With Sprint 6™, you can extend the useful life of your high throughput screening (HTS) systems, reduce training and maintenance costs and add value via new functionality.
  
  Instruments & Devices
  
  Celigo Imaging Cell Cytometer
  
  Celigo S Imaging Cell Cytometer
  
  The Celigo non-destructive and non-invasive brightfield analysis is complemented by multi-color fluorescence capabilities, making the system suitable for a wide variety of cell-based assays in any lab.
  
  Tube Auditor
  
  Tube Auditor
  
  The Brooks Tube Auditor performs quick and easy Goods-In and Goods-Out QA checks to help ensure that your suppliers are providing what you ordered and that your customers are receiving what you promised.
  
  Plate Auditor
  
  Plate Auditor
  
  Specifically designed for the detection and classification of features unique to HTS compound libraries. The Plate Auditor uses vision technology to identify empty wells / wells with insufficient volume of liquid compound sample, wells with colored compounds and wells with compound precipitation.
  
  XPeel
  
  XPeel Automated Microplate Seal Removal
  
  As the industry-standard automated microplate “de-sealer,” the Brooks XPeel provides the “gold standard” operating model (no lids) for automated seal removal to support reliable operation and maximize sample integrity.
  
  HTS Systems & Workcells
  
  HTS Systems & Workcells
  
  The Brooks HTS systems and work cells are designed with input from HTS labs in major pharma companies to ensure optimum usability. They provide a superior alternative to costly cart-based solutions that offer flexibility but make poor use of space and inflexible fixed instrument solutions that offer better instrument density and lower initial cost but are expensive to upgrade.
  
  ABF Automated Blood Fractionation System
  
  ABF Automated Blood Fractionation System
  
  The Brooks ABF™ is more than a liquid handler with a vision system; it’s a complete solution for blood fractionation that provides a controlled environment, process validation and full audit trail. With the Brooks ABF, you can process unique blood samples with confidence that sample integrity will be preserved and your staff’s health will be protected.
  
  Capping & Decapping
  
  Capping & Decapping
  
  The REMP® capping system is the only tube capping system designed for automation. It is used widely for both biological and compound samples. The latest version is designed specifically to work down to -80°C.
  
  Plate & Tube Sealing
  
  Plate & Tube Sealing
  
  REMP® introduced the concept of automated storage of samples in heat sealed tubes. The technology has been widely adopted by leading pharma and biorepositories as the most secure way to store samples.
  
  Seal Piercing
  
  Seal Piercing on Tubes and Plates
  
  The REMP® piercing lid range is unique – it offers the chance to pierce a foil seal with a wide hole for reliable liquid handling and, as the lids are disposable, there is no risk of cross-contamination. This range of devices allows for the simple operation of the piercing lids.
  
  Data Matrix Code Reading
  
  Data Matrix Code Reading
  
  The Reatrix allows reading of REMP Storage Tube Racks with a 2D DataMatrix Code. Can be used in automated systems or as a standalone unit.
  
  Tube Selecting
  
  Tube Selecting
  
  The tube punching module allows small collections or low throughput laboratories to automate the sample picking of REMP® 96-way tubes and REMP® 384-way tubes.
  
  Consumables
  
  Aurora High Performance Microplates
  
  Aurora High Performance Microplates
  
  High performance plate material as all Aurora microplates are made from cyclo-olefin polymer (COP). Assay miniaturization: 384, 1536 and 3456 formats. Aurora microplates are available with an evaporation barrier of sacrificial wells and a specially designed lid to minimize evaporation.
  
  REMP® Tube Technology
  
  REMP Tube Technology
  
  REMP® storage tubes offer industry leading storage quality and are specifically designed for automation. They have been proven in use for over 10 years and are used by many of the world’s leading biobanks and compound management facilities.
  
  REMP® Single Use Heat Sealed Tubes
  
  REMP Single Use Heat Sealed Tubes
  
  Providing the highest integrity of any capping or sealing system, it saves significantly on the space taken by a traditional cap. Single use tubes provide an efficient workflow and the tube sealing system is available on all tubes in the range from working volume of 40µl to 900µl.
  
  REMP® Capped Tube System
  
  REMP Capped Tube System
  
  Applications include compound and DNA storage, both working and stock solutions as well as other biological liquids such as serum and other blood components.
  
  REMP Storage Microplates
  
  REMP Storage Microplates
  
  Designed for heat sealing: Discrete raised rims around each well - reduces the risk of cross-contamination. Suitable for REMP® piercing lid system. 384 square well micro volume Storage Plate, SBS footprint. Maximum well volume of 128 µl / working volume 110 µl.
  
  96 Way Tubes
  
  96 Way Tubes
  
  Tubes that don't fall out as standard. Tubes may either be capped or heat sealed (REMP® Capped Tube System and Single Use Heat Seal). 100% read validation. 100% leak tested. Tubes are manufactured from medical grade polypropylene; free of detectable DNA, DNase/RNase, PCR inhibitors, ATP, pyrogens.
  
  384 Way Tubes
  
  384 Way Tubes
  
  Single-use, low cost per tube. Working volume of up to 40 µl and minimal dead volume of 2 µl. Tubes are manufactured from medical grade polypropylene; free of detectable DNA, DNase/RNase, PCR inhibitors, ATP, pyrogens.
  
  REMP®Tube Caps
  
  REMP Tube Caps
  
  REMP® tube caps are designed for automation. Read more about the REMP Capped Tube System. EMP® tube caps are available in ready caped tubes or in capmats.
  
  REMP® Heat Seals
  
  REMP Heat Seals
  
  REMP® offers a range of Thermo-Seal materials for different applications. Rolls have a capacity of 5,000 plates / tubes racks. Sheets are sold in boxes of 100.
  
  Lids & Piercing Lids
  
  Lids & Piercing Lids
  
  Piercing lids are designed for use with single use heat sealed tubes and other sealed containers (eg REMP® storage microplates). Lids are free of detectable DNA, DNase/RNase, PCR inhibitors, ATP and pyrogens.
- Gas Analysis &
  Vacuum Measurement
  
  Featured Product
  
  835 Vacuum Quality Monitor (VQM™)
  
  Brooks Granville-Phillips Products
  
  Vacuum Quality Monitor Systems
  
  835 Vacuum Quality Monitor (VQM™)
  
  835 Vacuum Quality Monitor (VQM™)
  
  Combines the highest performance gas analysis technology with intelligent functional design that transforms complex measurement into actionable information. The 835 VQM is the world’s fastest, lowest power mass spectrometer with full data collection, spectral deconvolution, and data logging at 85 ms capture rates for the full 1-145 amu measurement range or 125 ms for 1-300 amu.
  
  835 VQM Differential Pump System
  
  835 VQM Differential Pump System
  
  Extends the vacuum pressure range of the award-winning, high performance Vacuum Quality Monitor (VQM™) to address the needs of process monitoring and process control applications at pressures up to 3 Torr. All the benefits of the VQM, including speed and ease of use, can now be used to optimize PVD, ion implant, coating, and other vacuum processes to increase productivity, improve results, and save money.
  
  Vacuum Gauge Modules
  
  275 Mini-Convectron® Modules
  
  275 Mini-Convectron® Modules
  
  275 Mini-Convectron Modules combine the industry-standard Convectron® gauge with electronics in a compact, modular design. They are capable of measuring from atmosphere to 1x10-3 Torr (1x10-1 Pa).
  
  347 Stabil-lon® Modules
  
  347 Stabil-lon® Modules
  
  347 Stabil-Ion Modules mount the controller electronics directly on the gauge. The Stabil-Ion module makes all the features and benefits of the Stabil-Ion gauge available in a modular device.
  
  354 Micro-Ion® Modules
  
  354 Micro-Ion Modules
  
  354 Micro-Ion modular vacuum gauges are a convenient and reliable solution for applications that do not need front panel displays and controls. These compact, cost-saving modules have the control electronics mounted directly on the gauge.
  
  356 Micro-Ion® Plus Modules
  
  356 Micro-Ion® Plus Modules
  
  356 Micro-Ion Plus Vacuum Gauge Module combines the new miniature Conductron® Heat-Loss Sensor with proven Micro-Ion Gauge technology in the same vacuum envelope to extend pressure measurements from high vacuum to atmosphere. The Micro-Ion Plus design combines the control electronics and the gauge in a compact module that not only provides convenient high vacuum measurement, but is easy to interface to a control system.
  
  385 Convectron® ATM Module
  
  385 Convectron® ATM Module
  
  Combines a piezo-resistive diaphragm with a proven Convectron sensor to provide a continuous measurement from low vacuum to atmosphere as well as setpoint relay activation at a defined differential pressure from atmosphere.
  
  390 Micro-Ion® ATM Modules
  
  390 Micro-Ion® ATM Modules
  
  The 385 Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere.
  
  392 Micro-Ion® Plus Modules
  
  392 Micro-Ion® Plus Modules
  
  The 392 Micro-Ion Plus Series is a second-generation full range pressure measurement module that combines industry-standard Micro-Ion ionization gauge technology with a miniature Pirani Conductron® heat-loss sensor to provide accurate, continuous pressure measurement from high vacuum to atmosphere.
  
  Vacuum Gauges
  
  274 Glass Bayard-Alpert Type Ionization Gauges
  
  274 Glass Bayard-Alpert Type Ionization Gauges
  
  Granville-Phillips glass Bayard-Alpert ionization gauges have a bifilar grid and either a burn-out resistant filament or dual tungsten filaments.
  
  274 Nude Bayard-Alpert Type Ionization Gauges
  
  274 Nude Bayard-Alpert Type Ionization Gauges
  
  Nude Bayard-Alpert ionization gauges are available in two types: a single thoria-coated iridium filament gauge and a dual filament UHV gauge.
  
  275 Convectron® Pirani Gauges
  
  275 Convectron® Pirani Gauges
  
  The Granville-Phillips industry-standard convection-enhanced Pirani gauge provides reliable measurement from atmosphere to 10-4 Torr (10-2 Pascal). Its high accuracy and repeatability help to ensure that processes start at the desired pressure — time after time.
  
  355 Micro-Ion™ Gauges
  
  355 Micro-Ion™ Gauges
  
  355 Micro-Ion gauges are smaller, more rugged, and wider range than glass gauges. In addition, they generate less heat and provide greater burnout resistance.
  
  370 Stabil-Ion™ Gauges
  
  370 Stabil-Ion™ Gauges
  
  Stabil-Ion gauges feature an all metal gauge tube that eliminates glass breakage, glass decomposition, or helium permeation. A complete electrostatic shield and grounded metal gauge tube housing provide a stable electrical environment and shield against external electrical influences.
  
  Vacuum Gauge Controllers
  
  307 Bayard-Alpert
  
  307 Bayard-Alpert Gauge Controllers
  
  The 307 Bayard-Alpert Gauge Controller measures pressure and utilizes pressure-related outputs to control a variety of vacuum system functions and processes. The controller is available in a variety of configurations and prices to meet your application needs and resources.
  
  316 Low Vacuum Gauge Controllers
  
  316 Low Vacuum Gauge Controllers
  
  The 316 Low Vacuum Gauge Controller operates Convectron®, thermocouple and capacitance manometer gauges and reads pressure from 990 Torr to 1 x 10-4 Torr.
  
  350 Bayard-Alpert UHV Gauge Controllers
  
  350 Bayard-Alpert UHV Gauge Controllers
  
  The 350 Bayard-Alpert UHV Gauge Controller operates a Series 274 nude Bayard-Alpert type ionization gauge in a compact half-rack design.
  
  358 Micro-Ion® Gauge Controller
  
  358 Micro-Ion® Gauge Controller
  
  Granville-Phillips all-metal Micro-Ion Gauges with dual ion collectors provide a wide range of measurement in a miniature design for greater mounting flexibility. Micro-Ion gauges with operated with this rack-mount controller deliver unmatched ionization gauge performance. The basic controller operates one Micro-Ion Gauge with electron bombardment degas and remote control standard.
  
  370 Stabil-Ion® Gauge Controller
  
  370 Stabil-Ion® Gauge Controller
  
  The all-metal 370 Stabil-Ion® Gauges operated with this rack-mount controller provide unmatched ionization gauge performance. The 370 delivers the long-term performance of a spinning rotor gauge at a fraction of the cost using calibration on a chip.
  
  475 Convectron® Gauge Controller
  
  475 Convectron® Gauge Controller
  
  The Series 475 Convectron Vacuum Gauge Controller combines the industry-standard Convectron gauge technology with high-performance controller electronics and an easy-to-use interface — all in a compact package design.
  
  Variable Leak Valve
  
  Variable Leak Valve
  
  The Variable Leak Valve seals the mass spectrometer leak tight. They are constructed entirely of low vapor pressure metals to ensure minimum contamination.
- Cryopumps, Cryochillers &
  Compressors
  
  Featured Product
  
  On-Board® IS Cryopumps
  
  Brooks CTI-Cryogenics & Polycold
  
  Cryopumps
  
  On-Board® IS Cryopump Systems
  
  On-Board® IS Cryopump Systems
  
  Intelligent On-Board IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency.
  
  On-Board® Cryopumps
  
  On-Board® Cryopumps
  
  On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
  
  Cryo-Torr® Cryopumps
  
  Cryo-Torr® Cryopumps
  
  Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. For added flexibility, you can add your own customized controls and supporting peripherals to meet your specific application needs.
  
  On-Board® Waterpumps
  
  On-Board® Waterpumps
  
  On-Board Waterpumps are high-performance vacuum pumps that increase water vapor pumping speeds to substantially improve system throughput and provide better process results.
  
  PFC Water Vapor Cryopump
  
  PFC Water Vapor Cryopump
  
  The Brooks Polycold® PFC Water Vapor Cryopump effectively captures water vapor, which typically comprises 65% to 95% of the gas load in high vacuum systems. It pumps vapor within minutes of “start,” defrosts in less than four minutes, and lowers water vapor partial pressure during processing for higher quality, better adhesion, and more reproducible deposition.
  
  Cryochillers & Compressors
  
  P-102 Cryochiller
  
  P-102 Cryochiller
  
  Provides a compact, easy-to-use alternative to liquid nitrogen in small vacuum systems. These cryogenerators effectively eliminate the cost, inconvenience, and hazards associated with using liquid nitrogen — while delivering comparable performance.
  
  PGC Gas Chillers
  
  PGC Gas Chillers
  
  PGC Gas Chillers cool compressed dry gases, such as nitrogen, argon or air, from ambient to cryogenic temperature without pre-cooling. PGC Gas Chillers are closed-loop refrigeration systems that cool a non-recirculating gas stream using a refrigerant to gas tube-in-tube heat exchanger.
  
  PGCL Closed Loop Gas Chillers
  
  PGCL Closed Loop Gas Chillers
  
  PGCL Closed Loop Gas Chillers incorporates both a closed-loop refrigerating system and a re-circulating gas coolant system, making them capable of cooling a gas stream to temperatures below -100°C using highly efficient refrigerant heat exchangers.
  
  PCC Compact Coolers
  
  PCC Compact Coolers
  
  The PCC Compact Cooler is a compact, high-performance cooling system that brings new levels of efficiency and reliability to demanding applications such as high-resolution digital imaging, analytical chemistry, life sciences, materials analysis, semiconductor inspection, scientific research and water vapor cryotrapping.
  
  XC Cryochiller
  
  XC Cryochiller
  
  XC Cryochiller is the next generation PFC platform that builds on the Polycold long history of quality, reliability, and innovation, providing a multi-purpose cooler with industry-leading performance, state of the art controls, and environmentally responsible technology.
  
  Cryodyne Refrigerators
  
  Cryodyne Refrigerators
  
  Cryodyne Refrigeration Systems are a family of two-stage, closed-cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle. They offer usable heat lift from <10K to >80K, making them highly suitable for a variety of commercial and research applications.
  
  Compressors
  
  Compressors
  
  Brooks CTI-Cryogenics offers a choice of compressors designed to provide optimum performance with On-Board Cryopumps, Cryo-Torr Cryopumps and/or On-Board Waterpumps. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications for all Brooks vacuum pumps.
  
  Refrigerant Replacement Charges
  
  Refrigerant Replacement Charges
  
  Lookup the refrigerant replacement charge part number for your model number to place an order.
- Asset Tracking
  
  Featured Product
  
  Smart Tag 8200 & 8400 Family
  
  Infrared & RFID Asset ID Products
  
  Smart Tag Infrared 8200 and 8400 Family
  
  Smart Tag Infrared 8200 and 8400 Family
  
  The Brooks Auto ID System is the leading automated carrier ID system used in automated semiconductor fabs today. It combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, and probe cards.
  
  Low Frequency RFID Solutions
  
  AdvanTag™ 9100 & 9800 Family
  
  AdvanTag 9100 & 9800 Family
  
  The Brooks Auto ID System is the leading automated carrier ID system used in automated semiconductor fabs today. It combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, and probe cards.
  
  LF80 Mid Range Systems
  
  LF80 Mid Range Systems
  
  ZeniD RFID Reader - Uses the frequency LF 134.2 kHz and communicates with TIRIS™ transponders.
  
  LonWorks RFID Reader - Multiple LEDs LEDs provide information on the current operational mode, voltage, antenna mode and read/write status as well as displaying I/O signals.
  
  Profibus RFID Reader - Communicates with passive transponders using the frequency LF 134.2 kHz.
  
  LF60 Short Range Systems
  
  LF60 Short Range Systems
  
  Communicates with passive TIRIS™ transponders on an LF frequency of 134.2 kHz. Captured data are sent via a serial interface (RS232) to the higher-level system.
  
  LF40 Handheld Solutions
  
  LF40 Handheld Solutions
  
  Easy-to-operate read/write device to transfer transponder data to a computer for users who want to replace barcodes with RFID.
  
  LF Antennas
  
  LF Antennas
  
  Low Frequency Antennas are suitable for RFID Readers series LF (134,2 kHz). We offer multiple antennas either in rod or frame format.
  
  Evaluation Kits
  
  Evaluation Kits
  
  Designed for quick and easy implementation, the Evaluation Kit includes a complete system for immediate launching RFID technology. Ideal for small, focused deployments, this RFID kit enables to effective and affordable demonstration with your current business processes while laying the groundwork for a cost-effective upgrade path.
  
  High Frequency RFID Solutions
  
  HF80 Mid Range Systems
  
  HF80 Mid Range Systems
  
  Mid-Range RFID Reader - Differing plug & play antennas are also available, thus making it possible to find the optimal antenna configuration for every application. Transponders in conformity with ISO 15693 are identified (optional EEPC-transponder).
  
  Profibus RFID Reader - Stationary RFID Reader. Profibus DP Interface. 5 Antenna ports. Test mode. Optionale I/Os. Durable aluminum housing.
  
  HF60 Short Range Systems
  
  HF60 Short Range Systems
  
  IAE RFID Reader - Transfers the identified data either through a serial RS232 or an Ethernet interface. Numerous plug and play antenna types enable the system to adjust to different reading distances and applications.
  
  SAV RFID Reader - The device disposes of a PoE compatible (Power-over-Ethernet) connection and is also available as a wireless version.
  
  HF40 Handheld Solutions
  
  HF40 Handheld Solutions
  
  The device with keyboard emulation can be connected to a PC via USB. The reader automatically detects the driver and subsequently starts installation.
  
  HF30 OEM Module
  
  HF30 OEM Module
  
  RFID OEM Module AJ supports transponders and smart labels using frequency 13.56MHz according to ISO Standard 15693.
  
  HF20 Customized Solutions
  
  HF20 Customized Solutions
  
  This reader offeres a practical, effective and downright cost-attractive means of adding RFID capability to a PC. Fast and fuss-free, the PC is able to communicate with transponders and exchange data.
  
  HF Antennas
  
  HF Antennas
  
  HF Evaluation Kits
  
  HF Evaluation Kits
  
  Delivery includes one HF reader with serial interface, several antennas and a choice of RFID transponders. The RFID antennas may concurrently work with the reader which provides porting facilities for up to five antennas.
  
  Ultra High Frequency Solutions
  
  UF80 RFID Reader
  
  UF80 RFID Reader
  
  Operating status is indicated by three integrated LEDs. The reader also has three other outputs that can be enabled by protocol commands.
  
  UF70 Certum RFID Reader
  
  UF70 Certum RFID Reader
  
  Offers a broad range of applications by combining modularity and high performance at low investment costs. It comes with configuration software that allows a wide range of parameter settings for an individual adaption.
  
  Work In Process Solutions
  
  WIP Rack WRD HF20 "PlaceNGo"
  
  WIP Rack WRD HF20 "PlaceNGo"
  
  Intelligent WIP rack with RFID functionality HF20 WRD storage solution. It serves for managing and storing 200mm boxes and lots between individual process steps (customization to different 300mm FOUPs is possible).
  
  WIP Trolley HF20 "Where2Go"
  
  WIP Trolley HF20 "Where2Go"
  
  Trolley with integrated RFID system. No-power display. User navigation with buttons. Battery operation min 24h. Presence sensor. Identifies 200mm Lots and transport boxes Frequency 13,56 MHz. HSMS interface / WLAN connection.
- Alignment & Calibration Tools
  
  Featured Product
  
  Load Port Checker
  
  Alignment & Calibration Tools
  
  Load Port Alignment Tools
  
  Load Port Checker
  
  Load Port Checker
  
  The Load Port Checker LP-3004 inspects 16 parameters for load port alignment. The “real-time” display screens allow for fast, accurate load port setups, while on-screen instructions guide the technician through adjustments. “Report Card” screens provide for quick and easy inspections, minimizing operator errors.
  
  Load Port Force Gauge
  
  Load Port Force Gauge
  
  The FG-3000 load port force gauge allows you to measure load port docking force and door closure force to insure load port and FOUP interoperability. This is particularly critical with older load ports designed under less demanding SEMI load port force requirements. Simply place the unit on the kinematic pins, dock and/or close, and take your reading to insure compliance with current manufacturer recommendations.
  
  Robot Alignment Tools
  
  150mm, 200mm, 300mm
  
  Robot Alignment Tools - 150mm, 200mm, 300mm
  
  Stop “eyeball” alignments! Brooks ALIGN series of alignment tools provide a fast, repeatable, and highly accurate method of aligning your wafer handling equipment. Optimized for cluster tools, the RC-2004 200mm Robot Alignment Tool increases your yield and throughput with more accurate alignments while saving up to 75% of the time required by “eyeball” alignments.
  
  ▶ 150mm (RC-1504) ▶ 200mm (RC-2004) ▶ 200mm (RC-2005) ▶ 300mm (RC-3003)
  
  Electronic Levels
  
  Wafer Levels
  
  Wafer Levels
  
  Matching the weight of a silicon wafer, this versatile tool’s design allows use on end effectors and wafer handling blades as well as in wafer cassettes and quartz boats. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screen simplify operation, while the remote real-time display is convenient for remote adjustments.
  
  Spot Level
  
  Spot Level
  
  Designed as a versatile electronic level, this “spot” level can easily check level at 0 degrees, 90 degrees, and 180 degrees. A mounting-hole pattern can be used to attach the EL-5003 to your reference surface or substrate. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments.
  
  Reticle Level
  
  Reticle Level
  
  Designed to match a 150 mm reticle, this “reticle” level can easily measure robots and reticle positions for level or co-planarity. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments.
  
  Kinematic Pin Level
  
  Kinematic Pin Level
  
  Designed to rest on SEMI standard kinematic pins, this specialized level can accurately measure your load port’s level or co-planarity (or that of many other interfaces). A remote touch-screen display with real-time graphic and numeric data provides simplicity, accuracy, and flexibility.
  
  Setup Wafers
  
  Carbon Fiber Dummy Wafers
  
  Carbon Fiber Dummy Wafers
  
  Set up and cycle test your equipment without breaking silicon wafers. This high-tech carbon fiber composite wafer is virtually indestructible and is manufactured to SEMI-standard diameter, flatness and notch specifications. Carbon fiber dummy wafers are also designed to mimic the weight and structural characteristics of silicon wafers.
  
  Glass Target Wafers
  
  Glass Target Wafers
  
  Available in 125, 150, 200, 300 and 450 mm sizes. Manufactured from clear, precision ground glass. Precision markings placed on the wafer at every 2.5mm. Opaque perimeter allows the edge to be detected by wafer handling equipment. “Virtual” notch allows for compatibility with tools that require a notch.
  
  Cassette Checkers
  
  150mm & 200mm Cassette Checkers
  
  150mm & 200mm Cassette Checkers
  
  The 200mm MC-2000 and 150mm MC-1512 Cassette Checkers offer a quick answer to the question, “Is it the tool or the cassette?” Quit throwing good cassettes away. Quit finding bad cassettes by wasting good production wafers. Start checking your cassettes the sensible way — with the MC-1512 150mm or MC-2000 200mm Cassette Checkers!
  
  Alignment & Calibration Services
  
  Alignment Calibration Services
  
  Reduced Unscheduled Downtime
  
  Traceable, numeric data during all phases of tool deployment
  
  Faster, more accurate tool alignment
  
  Objective and data driven process
  
  Increased Mean Cycle Between Failure (MCBF)
  
  Improved wafer handling and reduced wafer scratching
  
  All service work is done by experts
  
  Attractive service pricing
  
  Interface Adapters
  
  Wafer Adapters in FOUP
  
  For 300mm FOUPs
  
  100mm, 150mm and 200mm Wafer Adapters in 300mm FOUPs
  
  Constructed from anodized aluminum and high-temperature thermoplastics.
  
  Retention features secure the adapter firmly, yet allow for easy removal.
  
  Compatible with FOUPs from all manufacturers.
  
  25 wafer capacity.
  
  Able to adjust wafers to forward or center position.
  
  Maintains wafer plane.
  
  For 450mm FOUPs
  
  Wafter Adapter for 450mm FOUPs
  
  Constructed from anodized aluminum and high-temperature thermoplastics.
  
  Retention features secure the adapter firmly, yet allow for easy removal.
  
  Compatible with FOUPs from all manufacturers.
  
  25 wafer capacity.
  
  Able to adjust wafers to forward or center position.
  
  Maintains wafer plane.
  
  Cassette Adapters
  
  in 300mm Load Port
  
  Cassette Adapter in 300mm Load Port
  
  Handling 300mm wafers is expensive! The Brooks AM-3006 wafer adapter allows 200mm wafers to be handled on a 300mm load port — saving you money! Simply place the unit on the kinematic pins and place a 200mm open cassette on the adapter. Remove the adapter at any time to return to 300mm capability.
  
  in 300mm FOUP
  
  Cassette Adapter in 300mm FOUP
  
  The Brooks cassette adapter allows a cassette with 200mm wafers to be handled inside a 300mm FOUP. Simply slide the unit in and start reducing your wafer costs. Remove the adapter at any time to return to 300mm capability.
  
  300mm Universal Adapter
  
  300mm Universal Adapter
  
  The AM-3010 wafer adapter allows 300mm, 200mm, 150mm, and 100mm cassettes to be processed inside a 300mm FOUP style microenvironment, all with standard 300mm equipment. Using the same system for all wafer sizes expands the capability of 300mm equipment and saves time and money. Simply place the unit on your load port to handle the various wafer sizes and cassettes. 300mm can also be handled inside the adapter in an open cassette, or remove the adapter at any time to return to 300mm FOUPs.
  
  11mm Lift Adapter for 300mm Cassettes
  
  11mm Lift Adapter for 300mm Cassettes
  
  This simple adapter allows you to quickly change from 300mm FOUPs to a 300mm process or shipping cassette without re-teaching your equipment. Simply place the adapter between the cassette and kinematic pins and run wafers. Then remove the adapter to immediately return to using a FOUP.
  
  Interface Tools
  
  Cassettes Carriers
  
  300mm Metal Cassettes
  
  300mm Metal Cassettes
  
  The CA-3000 is a 300mm metal cassette designed to support manual and automated handling and withstand high temperature applications. The exceedingly open design facilitates convective flow in thermal applications, yet the form factor is designed in accordance with SEMI FOUP specifications. This allows the cassette to support the full array of manual and automated handling without requiring changes to equipment settings.
  
  Reticle Cassettes
  
  Reticle Cassettes
  
  The CA-Series reticle cassettes are designed to allow handling of reticles in a wafer cassette form factor compatible with pods and general cassette platforms. The CA-2004 is one such cassette which accommodates 152mm reticles in a 200mm cassette form factor. This allows reticle handling to be done with standard semiconductor automation components including 200mm SMIF robots. It is compatible with all 200mm SMIF pods as well as open cassette platforms.
  
  Film Framer Shipper
  
  Film Framer Shipper
  
  Looking for a way to get your inventory to back-end facilities after thinning operations have been completed? The 300 mm Film Frame Shipper uses engineering plastics to transport 25 frames in an ergonomic container. The SEMI standard carrier follows the E1.9 and E47 specifications by using kinematic coupling registration to repeatably align your process carrier.
  
  Kinematic Pins & Standard Platforms
  
  300mm Kinematic Pin
  
  300mm Kinematic Pin
  
  The KP-3000 Kinematic Coupling Pins, one of the Brooks INTERFACE series of products, have been designed to reduce your interface problems. Manufactured to strict SEMI standards, our kinematic coupling pins provide you peace of mind. Neatly packaged sets of three matched pins are available in either press-fit or threaded configurations.
  
  450mm Kinematic Pin
  
  450mm Kinematic Pin
  
  The KP-4500 Kinematic Coupling Pins, one of the Brooks INTERFACE series of products, have been designed to reduce your interface problems. Manufactured to strict SEMI standards, our kinematic coupling pins provide tight tolerances and peace of mind. The 450mm kinematic pins are available in two designs – a fixed 25mm height and an adjustable height version with a unique mounting and locking mechanism. Both versions are offered in neatly packaged sets of three matched pins.
  
  Manual Pod Openers
  
  150mm SMIF Pod Opener
  
  150mm SMIF Pod Opener
  
  The MPO-1501 150mm SMIF Reticle Pod Opener provides precision manual opening and closing of 150mm wafer and reticle SMIF pods. Place it on, or mount to, work benches, WIP racks, or carts. Ergonomic in design and use, the MPO-1501 is a perfect addition to your fab.
  
  200mm SMIF Pod Opener
  
  200mm SMIF Pod Opener
  
  The MPO-2000 200mm SMIF Pod Opener provides precision manual opening and closing of 200mm SMIF pods. Place it on, or mount to, work benches, WIP racks, or carts. Ergonomic in design and use, the MPO-2000 is a perfect addition to your fab.
  
  300mm FOUP & FOSB Opener
  
  300mm FOUP & FOSB Opener
  
  The MPO-3002 300mm FOUP Opener is an ergonomically designed manual 300mm door opener for 25- and 13-capacity FOUPs and FOSBs. A short turn of the handle simultaneously opens both FOUP door locks. Positive stops hold the MPO-3002 in its fully open or fully closed position.
Applications By Industry
Services
- Contact Customer Care
- Repairs & Exchanges
  
  Repairs & Exchanges
  
  Repairs & Exchanges
  
  Fixed Price Repair program for atmospheric and vacuum robots, vacuum gauges, controllers, monitors and cryopumps.
  
  Global Repair Locations
  
  Repair locations in the United States, Europe and Asia.
  
  Copper Segregation
  
  Prevent the contamination of non-copper processes and the equipment used in those processes.
- Robot Repairs & Exchanges
  
  Featured Service
  
  Robot Repairs, Exchanges & Refurbishment
  
  Robot Repairs & Exchanges
  
  Vacuum Robots
  
  MagnaTran 7
  
  MagnaTran 7
  
  The MagnaTran® 7 (MAG 7) robot is the most advanced and reliable robot for operation in vacuum and isolation environments such as cluster tools. Reliability is proven at > 11.5 MCBF. With the MagnaTran 7 lengthy repair cycle times can lead to increased costs and unscheduled downtime. This is why Brooks created a Fixed Price Repair program to support the MagnaTran 7 robot.
  
  MagnaTran 8
  
  MagnaTran 8
  
  Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the MagnaTran 8 family of vacuum robots.
  
  VAC 407
  
  VAC 407
  
  Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the VAC-407 vacuum robot.
  
  Atmospheric Robots
  
  AcuLigner
  
  AcuLigner
  
  The AcuLigner™ atmospheric robot is an integral part of the Brooks Automation high performance atmospheric wafer handling solutions. Utilizing direct drive technology and on-board controls, these systems play a key role in your performance and productivity. Extensive downtime due to repair is not an option. That’s why Brooks has created a Fixed Price Repair program to support the AcuLigner product.
  
  AcuTran AquaTran
  
  AcuTran AquaTran
  
  Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the AcuTran/AquaTran 7 family of robots.
  
  MultiTran 5 VacuTran 5
  
  MultiTran 5 / VacuTran 5
  
  The MTR 5 M model MultiTran® 5 robot with the Brooks patented BiSymmetrik™ arm and dual SEMI/MESC compatible end effectors is a vacuum wafer handling robot which enables high throughput handling in isolated cluster tools.
  
  The VTR 5 M model VacuTran™ 5 robot is a high reliability wafer-handling robot with a SEMI/MESC compatible arm and end effectors. The VTR 5 M is a top mounting robot with a single arm configuration for application in large transport chamber modules such as those in cluster tools.
  
  Reliance ATR 8
  
  Reliance ATR 8
  
  With the Reliance ATR, lengthy repair cycle times can lead to increased costs and unscheduled downtime. For this reason Brooks has developed a Fixed Price Repair program to support the Reliance ATR.
  
  Equipe / PRI Robots
  
  AxM 100/200/400
  
  AxM 100/200/400
  
  One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
  
  Original Equipment Manufacturer: product technical experts and design engineers
  
  Repairs available in all regions that have major semiconductor fabs
  
  DBM 2400/2700
  
  DBM 2400/2700
  
  One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
  
  Original Equipment Manufacturer: product technical experts and design engineers
  
  Repairs available in all regions that have major semiconductor fabs
  
  PRE-200™ PreAligner
  
  PRE-200™ PreAligner
  
  One Stop Global shop for the widest range of Brooks, Equipe, PRI and Yaskawa robots
  
  Original Equipment Manufacturer: product technical experts and design engineers
  
  Repairs available in all regions that have major semiconductor fabs
  
  Robot Controllers
  
  Robot Controllers
  
  Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the robot controllers, to work with the AXM, DBM, AquaTran™/AcuTran® and Reliance™ ATR™ robot families.
- Cryopumps & Compressors
  Repairs & Refurbishment
  
  Featured Service
  
  Cryo-Torr Repair
  
  Cryopumps & Compressors
  Repairs & Refurbishment
  
  CTI-Cryogenics
  
  Repair locations in the United States, Europe and Asia.
  
  Cryo-Torr® Cryopumps
  
  Cryo-Torr® Cryopumps
  
  One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
  
  Original Equipment Manufacturer: product technical experts and design engineers
  
  Repairs available in all regions that have major semiconductor fabs
  
  One year comprehensive warranty on all repair levels
  
  On-Board® Cryopumps
  
  On-Board® Cryopumps
  
  One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
  
  Original Equipment Manufacturer: product technical experts and design engineers
  
  Repairs available in all regions that have major semiconductor fabs
  
  One year comprehensive warranty on all repair levels
  
  On-Board® IS Cryopumps
  
  On-Board® IS Cryopumps
  
  One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
  
  Original Equipment Manufacturer: product technical experts and design engineers
  
  Repairs available in all regions that have major semiconductor fabs
  
  One year comprehensive warranty on all repair levels
  
  Compressors
  
  Compressors
  
  One Stop Global shop for the widest range of CTI-Cryogenics cryopumps and compressors
  
  Original Equipment Manufacturer: product technical experts and design engineers
  
  Repairs available in all regions that have major semiconductor fabs
  
  One year comprehensive warranty on all repair levels
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