FACTORY AUTOMATION

When it comes to factory automation, manufacturers in today’s semiconductor and other complex manufacturing industries turn to Brooks for hardware solutions that optimize manufacturing efficiency, productivity, and yield. Our Automated Material Handling Systems (AHMS) store, transport and manage the movement of work-in-process waters and photolithography reticles. Our tool-fab interface products include interchangeable load port modules that provide industry-compatible interfaces for 200/300mm bridge tools. Our ultra-clean mini-environment/SMIF solutions perform to class 0.1 at wafer level in a class-1000 environment for high reliability and short recovery time.