GEMINI EXPRESS 5000 - 300MM
Vacuum Cluster Tool Integration Platform for 200mm to 300mm wafers
 The Gemini Express™ 5000 (GX5000) is a 200/300mm bridge handling system with capability for two load locks and three process facets. Load lock options include: 2-wafer pass-through; 2-wafer with cooling; 26-wafer batch; or 13-wafer batch with cooling. The Atmospheric front end is available to support 2, 3, 4 load ports and the complete family of 200 and 300mm Brooks load ports.
The GX5000 handles 200 and 300mm wafers without mechanical changes, and also fully integrates with Factory Automation solutions such as AGV, FOUP, Overhead Track, SMIF, and Ergonomic loading. The GX5000 is ideally suited for PVD or CVD and large process module footprints.
| The GX5000 is available at five levels of integration: |
|
| Level 1 |
Base System - Automation Components Mechanical Integration |
| Level 2 |
Vacuum Pumping System - Venting and Facilities |
| Level 2.5 |
Electrical Integration - Controls Wiring and System Power |
| Level 3 |
Tool Control Computer and Tool Control Software |
| Level 4 |
Supervisory Controller Supervisory System Software and GUI |
Click below to view the
Gemini Express 5000 Line Drawing
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